Fabrication of micro lenses using electron-beam lithography

Fujita, Tomoya; Nishihara, Hiroshi; Koyama, J.

doi:10.1364/ol.6.000613

Cited by 100 publications

(39 citation statements)

References 3 publications

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“…Currently, a great deal of research interest exists in their fabrication technologies (Feidhlim and Sheridan, 2002). Electron beam lithography was used to produce PMMA micro-lens (Fujita et al, 1981). Lens arrays employing moulds of suitable shape by hot embossing were made (Shen et al, 2002).…”

Section: Introductionmentioning

confidence: 99%

A study on curved surface laser ablation using beam profile approach

Garg¹,

Marla²,

Joshi³

2017

IJASMM

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Laser ablation process was used to generate micro-scale curved surfaces that find applications such as micro-lens and hydrophobic surfaces. Curved surface laser ablation to produce micro-scale features generally involves altering the spatial beam profiles using masks with varying spatial opacity. The surface profile obtained mainly depends on the altered laser beam profile. This work aimed at understanding the influence of laser beam profile on the generated surface in curved surface laser ablation. The study was based on a 2D finite element model of laser ablation that considered target heating, heat transfer and vaporisation on a poly methyl methacrylate (PMMA) target. Using this model, surface profile was predicted for various profiles of laser intensity and a qualitative analysis of curved surface profiles was carried out. The quantitative comparison of the ablation depths for uniform beam was used to validate the numerical model. The results of ablation depth were found to be in good agreement with that of the experiments.Keywords: laser ablation; curved surface; micro-lens; finite element model and beam profile approach.Reference to this paper should be made as follows: Garg, V., Marla, D. and Joshi, S.S. (2017) 'A study on curved surface laser ablation using beam profile approach', Int.

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Section: Introductionmentioning

confidence: 99%

A study on curved surface laser ablation using beam profile approach

Garg¹,

Marla²,

Joshi³

2017

IJASMM

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“…However, due to the fluctuations of the exposure energy, the temperature and the solvent concentration, the repeatability and stability of the processing were reduced during the lithography and heating. Electron beam lithography (EBL) and ion beam lithography (IBL) can obtain the arbitrary patterns, but the high cost and the low production efficiency restrict the industrial applications of the technologies [9,10]. Laser interference lithography can also be used to produce the periodic micro structures, but the intensity distributions of the interference patterns restricts the aspect ratio of the microstructures, and it is not suitable for micro-lens arrays [11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Hydrophobic Micro-lens Arrays by Capillary Force Lithography

Xu¹,

Xu²,

Wang³

et al. 2017

dteees

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Abstract. This paper presents a method based on the capillary force lithography technology to fabricate the micro-lens arrays. The micro-lens arrays characterized with hydrophobic were obtained by combining this capillary force lithography and photolithography. In the method, the PDMS is used as an elastomeric mold that has a planar surface with the negative concave micro-lens structures by casting PDMS against a complementary relief structure prepared by photolithography. The imaging and the hydrophobic performances of the micro-lens array are achieved during the experiments, and the maximum contact angle reaches 124° approximately. This technology is suitable for applications required a self-cleaning surface such as image sensors and detectors operating under the natural conditions.

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“…There are several methods for fabricating MLAs, such as ink-jet printing [14], lithographic patterning methods using an electron beam [15], a proton beam [16] or an ion beam [17], and thermal reflow methods [18][19][20][21][22][23]. In thermal reflow methods, photoresist (PR) cylinder structures made by photolithography are melted by thermal energy above the glass transition temperature of the PR.…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of Multi-Focusing Microlens Array with Different Numerical Apertures by using Thermal Reflow Method

Park¹,

Lee²,

Park³

et al. 2014

Journal of the Optical Society of Korea

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We present design and fabrication of a multi-focusing microlens array (MLA) using a thermal reflow method. To obtain multi-focusing properties with different numerical apertures at the elemental lens of the MLA, double-cylinder photoresist (PR) structures with different diameters were made within the guiding pattern with both photolithographic and partial developing processes. Due to the base PR layer supporting the thermal reflow process and the guiding structure, the thermally reflowed PR structure had different radii of curvatures with lens shapes that could be precisely modeled by the initial volume of the double-cylinder PR structures. Using the PR template, the hexagonally packed multi-focusing MLA was made via the replica molding method, which showed four different focal lengths of 0.9 mm, 1.1 mm, 1.6 mm, and 2.5 mm, and four different numerical apertures of 0.1799, 0.2783, 0.3973, and 0.4775.

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Fabrication of micro lenses using electron-beam lithography

Cited by 100 publications

References 3 publications

A study on curved surface laser ablation using beam profile approach

A study on curved surface laser ablation using beam profile approach

Fabrication of Hydrophobic Micro-lens Arrays by Capillary Force Lithography

Design and Fabrication of Multi-Focusing Microlens Array with Different Numerical Apertures by using Thermal Reflow Method

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