2013 10th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technolo 2013
DOI: 10.1109/ecticon.2013.6559467
|View full text |Cite
|
Sign up to set email alerts
|

Fabrication of metallic microchannel mold using X-ray LIGA for microfluidic applications

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2013
2013
2022
2022

Publication Types

Select...
3
1

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(1 citation statement)
references
References 4 publications
0
1
0
Order By: Relevance
“…The microwell layer was created by standard PDMS soft lithography using the nickel mold which was fabricated using X-ray LIGA technique 31 (Fig. 1(c)).…”
Section: Methodsmentioning
confidence: 99%
“…The microwell layer was created by standard PDMS soft lithography using the nickel mold which was fabricated using X-ray LIGA technique 31 (Fig. 1(c)).…”
Section: Methodsmentioning
confidence: 99%