Fabrication of metalic and silicon microactuators with high-aspect-ratio driving gaps

Iizuka, Tetsuhiko; Oba, T.; Fujita, Hiroyuki

doi:10.1109/apmrc.2000.898963

2000 Asia-Pacific Magnetic Recording Conference. Digests of APMRC2000 on Mechanical and Manufacturing Aspects of HDD (Cat. No.0

DOI: 10.1109/apmrc.2000.898963

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Fabrication of metalic and silicon microactuators with high-aspect-ratio driving gaps

Tetsuhiko Iizuka¹,

T. Oba²,

Hiroyuki Fujita³

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Fabrication of metalic and silicon microactuators with high-aspect-ratio driving gaps

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