Fabrication of metal roller mold with submicrometer feature size using contact printing photolithography technique

Abstract

Fabrication of a nanosize metal aperture for a near field scanning optical microscopy sensor using photoresist removal and sputtering techniques This paper presents an innovative approach for directly forming surface microstructures at submicrometer scale on the cylindrical surface of a metal roller. This roller can then serve as a roller mold in roller imprinting processes for large-area micro/nanofabrication. In the proposed approach, a novel contact printing method is used to transfer a patterned metal film from a planar soft mold to a thin photoresist (PR) layer coated on the roller surface. The pattern definition capability can easily reach submicrometer scale over a large patterning area. Subsequent ultraviolet light exposure and PR developing processes then form a layer of patterned PR microstructures on the cylindrical surface. Finally, patterned microfeatures are directly formed on the roller's surface by an additive (metal deposition) approach. The overall system design, experimental procedures, and experimental results are systematically discussed.

Biomarker detection for disease diagnosis using cost-effective microfluidic platforms

“…Hydrophobic barriers can be created on paper through either a physical deposition 83 or a chemical modification method. 84 A number of different fabrication methods have been developed to fabricate μPADs, such as fast photolithography, 85, 86 wax-based fabrication techniques, 83, 87 printing photolithography, 88 PDMS printing, 89 saline UV/O 3 patterning 90 , flexographic printing, 91 and alkenyl ketene dimer (AKD) printing. 84 Examples of wax-based fabrication include wax screen-printing, 87 wax dipping, 92 and wax printing.…”

System for Fabrication of Large-Area Roll Molds by Step-and-Repeat Liquid Transfer Imprint Lithography

“…Second, the resist cannot be coated onto the roll via a spin-coater. The dip-coating [12][13][14] and spray-coating [15,16] of the resist on the roll surface were studied as alternatives to spin coating. However, it is difficult to dip a large-area roll with a length of a few hundreds of mm into a resist container.…”