Fabrication of Metal Nanoparticle Arrays in the ZrO₂(Y), HfO₂(Y), and GeO_x Films by Magnetron Sputtering

Abstract

The single sheet arrays of Au nanoparticles (NPs) embedded into the ZrO 2 (Y), HfO 2 (Y), and GeO x ( ≈ 2) films have been fabricated by the alternating deposition of the nanometer-thick dielectric and metal films using Magnetron Sputtering followed by annealing. The structure and optical properties of the NP arrays have been studied, subject to the fabrication technology parameters. The possibility of fabricating dense single sheet Au NP arrays in the matrices listed above with controlled NP sizes (within 1 to 3 nm) and surface density has been demonstrated. A red shift of the plasmonic optical absorption peak in the optical transmission spectra of the nanocomposite films (in the wavelength band of 500 to 650 nm) has been observed. The effect was attributed to the excitation of the collective surface plasmon-polaritons in the dense Au NP arrays. The nanocomposite films fabricated in the present study can find various applications in nanoelectronics (e.g., single electronics, nonvolatile memory devices), integrated optics, and plasmonics.

A mechanism of effect of optical excitation on resistive switching in ZrO2(Y) films with Au nanoparticles

“…The ZrO 2 (Y) film with d 1 ≈ 5 nm was deposited onto the ITO layer by radio-frequency (RF) magnetron sputtering of a pressed powder ZrO To form the Au NPs, the stack was annealed at ≈450 • C in Ar ambient for ≈2 min. Earlier, the round Au NPs with R = 1-2 nm arranged in single sheet arrays inside the ZrO 2 (Y) films were shown to form after annealing of the ZrO 2 (Y)/Au/ZrO 2 (Y) stacks fabricated in the same regime [19,20].…”

Resonant Activation of Resistance Switching in Memristors Based on YSZ Films with Au Nanoparticles

“…The stack was annealed at 450 C during 2 min. Earlier, we found that the Au film transforms into a planar array of spherical Au NPs with the diameters ranging from 2 to 3 nm after annealing in the regime specified above [16]. Afterwards, the round Au top electrodes of 0.5 mm in diameter and 40 nm in thickness with 40-nm thick Ta sublayers were deposited through a shadow mask.…”

Scanning Kelvin Probe Microscopy investigation of optically induced charge in Au nanoparticles embedded into ZrO-=SUB=-2-=/SUB=-(Y) films

“…After deposition the sandwich structures were annealed in air at 450 • C for 2 min. A more detailed procedure for the formation of ZrO 2 (Y) films with Au NP arrays, as well as the results of studies of their structure and optical properties are given in [7,8]. According to the data of high-resolution transmission electron microscopy on transverse sections the Au island film ∼ 1 nm thick ruptures upon annealing under the indicated conditions and coagulates into NPs with a diameter of D = 2−3 nm, located practically in one plane at fixed distances from the film surface and the film substrate interface (which, in turn, are determined by the thicknesses of the coating and underlying oxide layers).…”