Fabrication of metal nano dot dry etching mask using block copolymer thin film

Fabrication of silicon nanodots on insulator using block copolymer thin film

“…We have fabricated nanodots by using Au, Cr, Al, and Ni [9]. Ni showed better endurance than the other metals in the dry-etching process.…”

Reactive ion beam etching of fused silica using vertical lamellar patterns of PS-b-PMMA diblock copolymer masks

“…The structures of the DiBCP can serve as template/mask for patterning functional materials by dry etching [6] or deposition, e.g. of metals [10]. For pattern transfer as well as for deposition/lift-off purposes the vertical alignment of laminar patterns is important.…”

Optical Determination and Identification of Organic Shells Around Nanoparticles: Application to Silver Nanoparticles

“…The synthesis of plasmonic nanoparticles (NPs) via top-down processes like Electron Beam Lithography [1,2], block copolymer photolithography [3], or nanosphere lithography [4,5] but also via bottom-up ways like chemical routes [6] have been deeply studied due to their high potential for applications in medicine [7], biosensing [8,9], hybrid photonic circuits [10,11], optical devices [12,13],… Among the family of plasmonic nanoparticles, silver nanoparticles exhibit appealing features like giant Surface Enhanced Raman Spectroscopy (SERS) enhancement [14,15]. In spite of their unique properties, Ag nanoparticles appear to be less attractive for applications than gold NPs whose properties are not altered by oxidation and thus are more stable [16].…”