2020
DOI: 10.1016/j.ssi.2020.115397
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Fabrication of Li1+xAlxGe2-x(PO4)3 thin films by sputtering for solid electrolytes

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Cited by 15 publications
(17 citation statements)
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“…However, further increase in annealing temperature leads to a much less uniform microstructure with interconnected porosity, possibly due to the enhanced evaporation of volatile species at higher temperatures. Similar porous microstructures have been observed in N-free LAGP when processed at high temperatures [12],…”
Section: Morphology Of the Deposited Filmssupporting
confidence: 74%
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“…However, further increase in annealing temperature leads to a much less uniform microstructure with interconnected porosity, possibly due to the enhanced evaporation of volatile species at higher temperatures. Similar porous microstructures have been observed in N-free LAGP when processed at high temperatures [12],…”
Section: Morphology Of the Deposited Filmssupporting
confidence: 74%
“…Recently we optimised the sputtering and post annealing parameters to fabricate 1 µm LAGP films with ionic conductivities as high as 10 -4 S cm -1 [12], comparable to those reported for bulk ceramic samples fabricated by solid-state processing at high temperatures [3], [4].…”
Section: Introductionmentioning
confidence: 64%
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“…In addressing this issue, various strategies have been developed for the fabrication of thin-film inorganic solid electrolytes including physical and chemical deposition techniques . For physical deposition, evaporation (e.g., pulsed laser deposition and electron beam evaporation) and sputtering (e.g., radio frequency (RF) magnetron sputtering) are commonly used techniques with wide material selection. However, the physical vapor deposition suffers from line-of-sight material transfer, which can result in shadowing effect during deposition. This can cause poor conformal coating and nonuniform film thickness over the surface, in deep trenches, and structures with submicrometer and high aspect ratios .…”
Section: Semi-solid/solid Electrolytes In Flexible and Portable Elect...mentioning
confidence: 99%