Fabrication of large-scale uniform submicron inverted pyramid pit arrays on silicon substrates by laser interference lithography

Xu, Ran; Deng, Zhen; Yin, Ya‐Xia; Wang, Sen; Li, Xinxin; Ma, Zhuangzhuang; Jiang, Yang; Wang, Lu; Du, Chunhua; Jia, Haiqiang; Wang, Wenxin; Chen, Hong

doi:10.1016/j.vacuum.2019.03.042

Cited by 3 publications

(2 citation statements)

References 33 publications

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“…[37] In general, silicon inverted pyramids (SiIPs) are synthesized by anisotropic-metal-assisted chemical etching method with random arrangement [37][38][39][40] or lithography-assisted method for periodic arrangement. [42,43] No investigation has been reported for lithography-free method for synthesis of periodic/ quasiperiodic IPAs still now, and reported samples have a relatively high reflection. [10,[37][38][39][40] In this report, we have developed a lithography-free method for the synthesis of the size-and interpyramid-space-controlled silicon nano/micro-IPAs, which shows a very low reflection in 300-2000 nm range along with high absorption in the sub-band region of silicon, which could lead to high increment of short-circuit current density ( J SC ).…”

Section: Introductionmentioning

confidence: 99%

Lithography‐Free Method to Synthesize Quasiperiodic Silicon Inverted‐Pyramid Arrays: A Broadband Light Trapper for High‐Efficiency Thin Silicon Solar Cells

Kumar,

Rani,

Saini

et al. 2024

Solar RRL

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Thin silicon solar cells could be a low‐cost effective photo‐conversion device, if the device can efficiently absorb the solar spectrum. Here, a new lithography free technique has been developed for the fabrication of quasi‐periodic silicon inverted pyramids arrays (SiIPAs), which show a high light trapping phenomena in the UV‐VIS‐NIR (300 nm‐2000 nm). Fabricated SiIPA samples show a significant reduction of reflectance (3%) in the silicon absorption band (300 nm – 1000 nm). A unique additional absorption of 33 – 44% compared to the planar silicon, has been observed in the sub‐bandgap region of silicon (1100 – 2000 nm) for these samples. Photocurrent response measurement confirms the generation of additional electron‐hole pairs in the sub‐bandgap region of silicon for the SiIPA samples in comparison with planar sample. These results signify the effect of field confinement and the creation of optical resonance modes within these structures, qualitatively supported by numerical simulation. The estimated short circuit current density (JSC) using the experimental absorption spectrum of SiIP arrays is 55.46 mA/cm2, which is far higher than the Lambertian limit of ∽ 43 mA/cm2. The theoretical efficiency of the solar cell can be achieved up to 35.22%, which surpasses the Shockley‐Queisser limit of 33.7%.This article is protected by copyright. All rights reserved.

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Section: Introductionmentioning

confidence: 99%

Lithography‐Free Method to Synthesize Quasiperiodic Silicon Inverted‐Pyramid Arrays: A Broadband Light Trapper for High‐Efficiency Thin Silicon Solar Cells

Kumar,

Rani,

Saini

et al. 2024

Solar RRL

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“…On the basis of turning, ultra-precision fly cutting is developed, it is a cutting technology with constant cutting speed and more flexible cutting trajectory, which is suitable for specific micro-structures machining [42][43][44]. Nowadays, the micro-structures fabricated by UPM are more diversified, such as spherical/aspherical lens [45][46][47], multi-focal lens, Fresnel lens [48][49][50][51], polygonal mirror [52], pyramid array [53,54], micro-structure array [55], anti-reflection channel, and V-groove [56,57], etc. [58].…”

Section: Introductionmentioning

confidence: 99%

A Review of Advances in Fabrication Methods and Assistive Technologies of Micro-Structured Surfaces

Zhang

Cao

et al. 2023

Processes

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Micro-structured surfaces possess excellent properties of friction, lubrication, drag reduction, antibacterial, and self-cleaning, which have been widely applied in optical, medical, national defense, aerospace fields, etc. Therefore, it is requisite to study the fabrication methods of micro-structures to improve the accuracy and enhance the performance of micro-structures. At present, there are plenty of studies focusing on the preparation of micro-structures; therefore, systematic review of the technologies and developing trend on the fabrication of micro-structures are needed. In present review, the fabrication methods of various micro-structures are compared and summarized. Specially, the characteristics and applications of ultra-precision machining (UPM) technology in the fabrication of micro-structures are mainly discussed. Additionally, the assistive technologies applied into UPM, such as fast tool servo (FTS) technology and slow tool servo (STS) technology to fabricate micro-structures with different characteristics are summarized. Finally, the principal characteristics and applications of fly cutting technology in manufacturing special micro-structures are presented. From the review, it is found that by combining different machining methods to prepare the base layer surface first and then fabricate the sublayer surface, the advantages of different machining technologies can be greatly exerted, which is of great significance for the preparation of multi-layer and multi-scale micro-structures. Furthermore, the combination of ultra-precision fly cutting and FTS/STS possess advantages in realizing complex micro-structures with high aspect ratio and high resolution. However, residual tool marks and material recovery are still the key factors affecting the form accuracy of machined micro-structures. This review provides advances in fabrication methods and assistive technologies of micro-structured surfaces, which serves as the guidance for both fabrication and application of multi-layer and multi-scale micro-structures.

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Fabrication of micro-array structures on material surface by a piezo-driven device

Sun

et al. 2022

Vacuum

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Fabrication of large-scale uniform submicron inverted pyramid pit arrays on silicon substrates by laser interference lithography

Cited by 3 publications

References 33 publications

Lithography‐Free Method to Synthesize Quasiperiodic Silicon Inverted‐Pyramid Arrays: A Broadband Light Trapper for High‐Efficiency Thin Silicon Solar Cells

Lithography‐Free Method to Synthesize Quasiperiodic Silicon Inverted‐Pyramid Arrays: A Broadband Light Trapper for High‐Efficiency Thin Silicon Solar Cells

A Review of Advances in Fabrication Methods and Assistive Technologies of Micro-Structured Surfaces

Fabrication of micro-array structures on material surface by a piezo-driven device

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