Fabrication of Large-Area Silicon Spherical Microlens Arrays by Thermal Reflow and ICP Etching
Yu Wu,
Xianshan Dong,
Xuefang Wang
et al.
Abstract:In this paper, we proposed an efficient and high-precision process for fabricating large-area microlens arrays using thermal reflow combined with ICP etching. When the temperature rises above the glass transition temperature, the polymer cylinder will reflow into a smooth hemisphere due to the surface tension effect. The dimensional differences generated after reflow can be corrected using etching selectivity in the following ICP etching process, which transfers the microstructure on the photoresist to the sub… Show more
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