Fabrication of large-area grating structures through laser ablation

Bekesi, J.; Meinertz, J.; Ihlemann, J.; Simon, Péter

doi:10.1007/s00339-008-4680-2

Cited by 29 publications

(11 citation statements)

References 11 publications

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“…Using F 2 laser at 157 nm, submicrometer RWGs were realized with a grating depth in the 5–50 nm range . A grating–interferometer setup can further improve the quality of gratings made via laser ablation …”

Section: Fabrication Techniques Implementations and Materialsmentioning

confidence: 99%

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Recent Advances in Resonant Waveguide Gratings

Quaranta

Basset

Martin

et al. 2018

Laser & Photonics Reviews

307

199

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Resonant waveguide gratings (RWGs), also known as guided mode resonant (GMR) gratings or waveguide‐mode resonant gratings, are dielectric structures where these resonant diffractive elements benefit from lateral leaky guided modes from UV to microwave frequencies in many different configurations. A broad range of optical effects are obtained using RWGs such as waveguide coupling, filtering, focusing, field enhancement and nonlinear effects, magneto‐optical Kerr effect, or electromagnetically induced transparency. Thanks to their high degree of optical tunability (wavelength, phase, polarization, intensity) and the variety of fabrication processes and materials available, RWGs have been implemented in a broad scope of applications in research and industry: refractive index and fluorescence biosensors, solar cells and photodetectors, signal processing, polarizers and wave plates, spectrometers, active tunable filters, mirrors for lasers and optical security features. The aim of this review is to discuss the latest developments in the field including numerical modeling, manufacturing, the physics, and applications of RWGs. Scientists and engineers interested in using RWGs for their application will also find links to the standard tools and references in modeling and fabrication according to their needs.

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Section: Fabrication Techniques Implementations and Materialsmentioning

confidence: 99%

“…[118] A grating-interferometer setup can further improve the quality of gratings made via laser ablation. [119]…”

Section: Laser Ablationmentioning

confidence: 99%

Recent Advances in Resonant Waveguide Gratings

Quaranta

Basset

Martin

et al. 2018

Laser & Photonics Reviews

307

199

View full text Add to dashboard Cite

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“…For the fabrication of these surface structures, laser beam interference ablation (LBIA) was used as shown in Figure 1b, applying a special interferometer-based technique developed at LLG. In this approach, the key component is a so-called grating interferometer [9,31], which creates a well-defined, high quality interference pattern, projected onto the sample surface. This interferometer consists of two transmission phase gratings made of fused silica with their grating lines lined up parallel to each other.…”

Section: Lbiamentioning

confidence: 99%

“…On the other hand, advanced processing techniques can fabricate surface texturing patterns with feature sizes magnitudes below the applied laser spot size. Out of this research field, we use Laser-Induced Periodic Surface Structures (LIPSS) [8] and Laser Beam Interference Ablation (LBIA) [9] to fabricate periodic linear patterns on solid surfaces with feature sizes of approx. 1 µm.…”

Section: Introductionmentioning

confidence: 99%

Possibilities of Dry and Lubricated Friction Modification Enabled by Different Ultrashort Laser-Based Surface Structuring Methods

et al. 2019

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In this contribution we report on the possibilities of dry and lubricated friction modification introduced by different laser surface texturing methods. We compare the potential of Laser-Induced Periodic Surface Structures and Laser Beam Interference Ablation on 100Cr6 steel in a linear reciprocating ball-on-disc configuration using 100Cr6 steel and tungsten carbide balls with load forces between 50 mN and 1000 mN. For dry friction, we find a possibility to reduce the coefficient of friction and we observe a pronounced direction dependency for surfaces fabricated by Laser Beam Interference Ablation. Furthermore, Laser-Induced Periodic Surface Structures result in a load-dependent friction reduction for lubricated linear reciprocating movements. This work helps to identify the modification behaviour of laser generated micro structures with feature sizes of approximately 1 µm and reveals new possibilities for surface engineering.

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“…Fabrication of microholes, grooves, gratings using ns laser ablation was widely investigated for usage in sensors, microfluidic devices, optoelectronic devices, solar cells, etc. For instance, formation of high quality periodic surface grating, graded transmission dielectric masks, metal foil and thin mask were reported in [51,52]. Also, microstructuring of thin films used in solar cells and nanotechnology were studied in [53][54][55][56].…”

Section: Nanosecond (Ns) Laser Direct Writingmentioning

confidence: 99%

Investigation into surface texturing by magnetic field assisted laser-produced plasma

Farrokhi¹

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Wang Zhongke (SIMTech) for their kind suggestions and help. Besides, I appreciate the good working environment, kind assistance, and friendly encouragement from our research group and kind staffs at NTU. And finally, but most of all, I would like to thank my father soul, Ahmad, for his encouragement in my dreams, my mother, Aleme, for her encouragement, support, and love, my dear brothers, Prof. Farahman Farrokhi, Dr. Alireza Farrokhi, and Mr. Mohammad Farrokhi for their constant help, support and encouragement, my best PhD friend, Dr. Dong Jing, for her kindness and friendship. The last thing to say is that I heartily appreciate all your kindness, help, support, and consideration. I really hope all lessons that I have got during my study in NTU/Singapore could help me to build the path into Good Thoughts, Good Words, and Good Deeds throughout my life. This is my ultimate goal before leaving this planet, Earth.

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Fabrication of large-area grating structures through laser ablation

Cited by 29 publications

References 11 publications

Recent Advances in Resonant Waveguide Gratings

Recent Advances in Resonant Waveguide Gratings

Possibilities of Dry and Lubricated Friction Modification Enabled by Different Ultrashort Laser-Based Surface Structuring Methods

Investigation into surface texturing by magnetic field assisted laser-produced plasma

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