2015
DOI: 10.7567/jjap.54.10na13
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Fabrication of (K,Na)NbO3films on SrRuO3/(001)SrTiO3substrates by pulsed laser deposition

Abstract: 1-3-µm-thick (K,Na)NbO 3 films were epitaxially grown on SrRuO 3 /(001)SrTiO 3 substrates by the pulsed laser deposition using (K x Na 1%x )NbO 3 targets. Energy dispersive X-ray spectroscopy analysis showed that the film K content was about 10% lower than the target K content x at x = 0.1-0.8, and the (K + Na)/Nb atomic ratio was 0.8-1.0. Reciprocal space mapping of the films revealed that the films were epitaxially grown at x = 0-0.7, and the crystal system was altered with increasing K content. Ferroelectri… Show more

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Cited by 20 publications
(22 citation statements)
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“…The KNN-based thin film exhibits highquality single crystallinity with an atomically sharp and flat interface structure and the same orientation as the substrate. [26] This result confirms the monoclinic M C phase of the KNN-based thin film at room temperature. Supperlattice spots are observed in the SAED images along zone axis 010 in the thin film, which is the characteristic diffraction pattern of monoclinic M C phase.…”
Section: Resultssupporting
confidence: 77%
See 1 more Smart Citation
“…The KNN-based thin film exhibits highquality single crystallinity with an atomically sharp and flat interface structure and the same orientation as the substrate. [26] This result confirms the monoclinic M C phase of the KNN-based thin film at room temperature. Supperlattice spots are observed in the SAED images along zone axis 010 in the thin film, which is the characteristic diffraction pattern of monoclinic M C phase.…”
Section: Resultssupporting
confidence: 77%
“…PZT exhibits a maximum piezoelectric coefficient at a morphotropic phase boundary (MPB) close to Zr/Ti = 52/48, where rhombohedral and tetragonal phases coexist. [26][27][28][29] In this work, KNN epitaxial thin films were prepared by a sol-gel method on (001)-oriented Nb:SrTiO 3 (STO) substrate. [5] Those boundary in KNN-based ceramics.…”
Section: Introductionmentioning
confidence: 99%
“…KNN films are the solid solution of KNbO 3 and NaNbO 3 . Interestingly, they can form the solid solution at any ratio in the form of film as in the case of bulk ceramics . However, it is always challenging to fabricate high‐quality and uniform KNN‐based films with stoichiometric compositions due to the complexity of the film composition and the volatilization of K and Na elements at high temperatures.…”
Section: Epitaxial Filmsmentioning
confidence: 99%
“…Motivated by excellent properties of KNN‐based ceramics, KNN‐based films have also drawn increasing attention due to the potential applications for miniaturized devices in microelectromechanical systems (MEMS) . However, prior to this, the piezoelectric properties of KNN‐based films were not the primary consideration .…”
Section: Introductionmentioning
confidence: 99%
“…Additionally, the research of KNN‐based thin films has also gained increasing attention due to the promising properties of their bulk counterparts as well as their potential applications in miniaturized sensors, actuators, energy harvesting systems, and microelectromechanical systems (MEMS) . However, the thin films suffered from the limited thickness and the substrate clamping effect.…”
Section: Introductionmentioning
confidence: 99%