Fabrication of (K,Na)NbO&lt;inf&gt;3&lt;/inf&gt; thin films on Si substrate by pulsed laser deposition

{100}c-, {110}c- and {111}c-oriented epitaxial (K, Na)NbO3 thin films were grown at 240 °C on (100)cSrRuO3//(100)SrTiO3, (110)cSrRuO3//(110)SrTiO3, and (111)cSrRuO3//(111)SrTiO3 substrates by the hydrothermal method. Their film thicknesses increased with the deposition time and then eventually saturated at longer deposition times. Their saturated film thicknesses were mainly determined by their orientation and the order was {100}c-, {110}c- and {111}c-orientation regardless of any experimental conditions. These films consisted of grains with characteristic morphologies. All of the films exhibited similar ferroelectric and piezoelectric properties irrespective of the film orientation. The remnant polarizations (Pr) and coercive fields (Ec) of the {100}c-, {110}c- and {111}c-oriented films at the maximum electric field of 500 kV cm−1 were 31 μC cm−2 and 111 kV cm−1, 27 μC cm−2 and 94 kV cm−1, and 25 μC cm−2 and 110 kV cm−1, respectively, while their effective values of piezoelectric coefficient (d33) were approximately 31–33 pm V−1. Similar films are associated with its mixed domain structure.

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Growth of epitaxial (K, Na)NbO₃films with various orientations by hydrothermal method and their properties

Ito

Tateyama

Nakamura

et al. 2019

Jpn. J. Appl. Phys.

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Fabrication of (K,Na)NbO<inf>3</inf> thin films on Si substrate by pulsed laser deposition

Cited by 1 publication

References 15 publications

Growth of epitaxial (K, Na)NbO₃films with various orientations by hydrothermal method and their properties

Growth of epitaxial (K, Na)NbO₃films with various orientations by hydrothermal method and their properties

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Fabrication of (K,Na)NbO<inf>3</inf> thin films on Si substrate by pulsed laser deposition

Cited by 1 publication

References 15 publications

Growth of epitaxial (K, Na)NbO3films with various orientations by hydrothermal method and their properties

Growth of epitaxial (K, Na)NbO3films with various orientations by hydrothermal method and their properties

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Product

Resources

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Growth of epitaxial (K, Na)NbO₃films with various orientations by hydrothermal method and their properties

Growth of epitaxial (K, Na)NbO₃films with various orientations by hydrothermal method and their properties