Fabrication of Impedance Sensor with Hydrophilic Property to Monitor Soil Water Content for Slope Failure Prognostics

Abstract

To minimize the damage caused by slope failure, knowledge of the increase in water content in mountain soil is important. Our group has been studying miniaturized impedance sensors for multipoint measurements in soil. Conventional sensors with a SiN x top film sometimes cannot detect changes in the water content in soil resulting from rain. Experiments on the slide distances of water droplets were performed using SiO x and SiN x films. As the slide distance of the SiO x film was shorter than that of the SiN x film, it was confirmed that the SiO x film is more hydrophilic than the SiN x film. To improve contact characteristics between the sensor surface and free water in soil, we covered our conventional sensor chip with a hydrophilic SiO x film. As a contact property test, the sensor chip measured the impedances of model soils. The proposed sensor achieved stable contact with the free water in the soil. Moreover, the chip operated for a long period of time on a mountain slope. The sensor could measure nearly theoretical outputs in response to rainfall. Thus, we succeeded in fabricating a stable soil monitor sensor with a hydrophilic SiO x film.

Development of frequency measurement circuit for soil moisture content and electric conductivity measurement system with detection of soil transient response characteristics for on‐site measurement

“…Thus, one needs a compact sensor to measure both water content and electrical conductivity. Our research group developed an nuclear magnetic resonance (NMR) sensor to detect various ions, 8 and miniature multimodal sensors to measure temperature, water content, electric conductivity, and pH in real time [9][10][11][12][13] (Figure 1). In the multimodal sensor system, sensors integrated on a small substrate (5 mm square) using silicon IC technology can simultaneously measure water content, electric conductivity, pH, and temperature.…”