Fabrication of high sensitivity ZnO thin film ultrasonic devices by electrochemical etch techniques

Chang, Chih-Ming; Chen, Y.E.

doi:10.1109/58.658315

Cited by 24 publications

(8 citation statements)

References 14 publications

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“…Zinc oxide (ZnO) is a wide-band gap II-VI semiconductor with very attractive properties such as high transparency in the 0.4-2 mm optical wavelength range, high piezoelectric constant, large electro-optic coefficient, and large exciton binding energy of $60 meV at room temperature [1][2][3][4]. In recent years, the fabrication of ZnO-based films has attracted a considerable amount of interest due to their potential application in solar cells, gas sensors, optical waveguides, surface acoustic devices, piezoelectric transducers and varistors [5][6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Effects of doping concentration and annealing temperature on properties of highly-oriented Al-doped ZnO films

Kuo¹,

Chen²,

Lai³

et al. 2006

Journal of Crystal Growth

378

116

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Section: Introductionmentioning

confidence: 99%

Effects of doping concentration and annealing temperature on properties of highly-oriented Al-doped ZnO films

Kuo¹,

Chen²,

Lai³

et al. 2006

Journal of Crystal Growth

378

116

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“…Conventional ultrasound transducers are most commonly made from a piezoceramic material such as Lead-Zirconate-Titanate (PZT), Zinc Oxide (ZnO), Barium Titanate (BaTiO

) and Lead Titanate (PbTiO

) [ 39 , 40 , 41 ]. A thin-film coating can be fabricated by thermal or plasma spraying, electrochemical etching or physical vapour deposition methods such as sputtering [ 42 , 43 , 44 , 45 ]. These methods can only be applied on flat structures and, in the case of plasma spraying, further post-deposition is required since the produced films are porous.…”

Section: High-temperature Ultrasonic Transducers (Htut) By Sol-gel Techniquementioning

confidence: 99%

Ultrasound Sensors for Process Monitoring in Injection Moulding

Kariminejad

Tormey

Huq

et al. 2021

Sensors

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Injection moulding is an extremely important industrial process, being one of the most commonly-used plastic formation techniques. However, the industry faces many current challenges associated with demands for greater product customisation, higher precision and, most urgently, a shift towards more sustainable materials and processing. Accurate real-time sensing of the material and part properties during processing is key to achieving rapid process optimisation and set-up, reducing down-times, and reducing waste material and energy in the production of defective products. While most commercial processes rely on point measurements of pressure and temperature, ultrasound transducers represent a non-invasive and non-destructive source of rich information on the mould, the cavity and the polymer melt, and its morphology, which affect critical quality parameters such as shrinkage and warpage. In this paper the relationship between polymer properties and the propagation of ultrasonic waves is described and the application of ultrasound measurements in injection moulding is evaluated. The principles and operation of both conventional and high temperature ultrasound transducers (HTUTs) are reviewed together with their impact on improving the efficiency of the injection moulding process. The benefits and challenges associated with the recent development of sol-gel methods for HTUT fabrication are described together with a synopsis of further research and development needed to ensure a greater industrial uptake of ultrasonic sensing in injection moulding.

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“…Zinc oxide (ZnO) is widely used in various applications such as ultraviolet (UV) resistive coatings, 1) gas sensors, 2) sonar for locating fish, 3) and mobile phones. 4) The production of optically transparent and low-resistivity (n-type and p-type) ZnO films by doping appropriate elements 5) will open up various electrical and optical applications.…”

Section: Introductionmentioning

confidence: 99%

A New Preparation Method of ZnO Cubic Phase Particle and Its IR Spectrum

Tanigaki

Kimura

Tamura

et al. 2002

Jpn. J. Appl. Phys.

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ZnO ultrafine particles were produced by dropping Zn powder into a nichrome boat heated above 1000 C in a mixture gas of argon and oxygen. Cubic ZnO particles were predominantly produced in the mixture gas of oxygen at 5 Torr and argon at 95 Torr. The well-known hexagonal smoke particles were predominantly produced in the mixture gas of oxygen partial pressure of more than 20 Torr in the total pressure of 100 Torr. The characteristic infrared (IR) spectra due to the cubic and hexagonal phase were observed experimentally. The IR spectra of samples embedded in KBr pellets exhibited a peak at 20.3 m wavelength for the cubic phase, and 18.3 m and 23.0 m wavelength for the hexagonal phase. The existence of cubic nuclei at the center of the tetrapod shape has been confirmed from the IR spectra.

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Fabrication of high sensitivity ZnO thin film ultrasonic devices by electrochemical etch techniques

Cited by 24 publications

References 14 publications

Effects of doping concentration and annealing temperature on properties of highly-oriented Al-doped ZnO films

Effects of doping concentration and annealing temperature on properties of highly-oriented Al-doped ZnO films

Ultrasound Sensors for Process Monitoring in Injection Moulding

A New Preparation Method of ZnO Cubic Phase Particle and Its IR Spectrum

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