Fabrication of high frequency two-dimensional nanoactuators for scanned probe devices

Yao, Jin; Arney, S.; MacDonald, N.C.

doi:10.1109/84.128051

Cited by 71 publications

(35 citation statements)

References 24 publications

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“…1 Other authors have reported recipes for fabricating submicron suspended Si structures. 2,3 These recipes are somewhat more complicated and require more extensive processing equipment than the method we describe here. The final undercut step of the suspended structures is performed in our recipe by using a dry etch process, which avoids potential damage due to surface tension encountered in wet etch processes.…”

confidence: 99%

Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals

Cleland¹,

Roukes²

1996

Applied Physics Letters

498

362

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We report on a method to fabricate nanometer scale mechanical structures from bulk, single-crystal Si substrates. A technique developed previously required more complex fabrication methods and an undercut step using wet chemical processing. Our method does not require low pressure chemical vapor deposition of intermediate masking layers, and the final step in the processing uses a dry etch technique, avoiding the difficulties encountered from surface tension effects when wet processing mechanically delicate or large aspect ratio structures. Using this technique, we demonstrate fabrication of a mechanical resonator with a fundamental resonance frequency of 70.72 MHz and a quality factor of 2ϫ10 4 . © 1996 American Institute of Physics. ͓S0003-6951͑96͒04144-7͔The combination of electron beam lithography and Si micromachining techniques makes it possible to fabricate submicron mechanical structures from single crystal substrates. Structures can be fabricated with fundamental mechanical resonance frequencies reaching into the microwave frequency bands, and can be made small enough that it is statistically unlikely that there are any crystalline defects contained within the structure. Such structures should exhibit very high quality factors and other mechanical properties that reflect the true nature of the material, such as large breaking stress. Elsewhere we have shown that such devices can be used in a new class of particle and energy sensors due to their very small mass, small size, high operating frequencies, and sensitivity to external conditions. 1 Furthermore, a resonator with a fundamental mechanical resonance frequency of a few times 10 9 Hz can be fabricated; this could exhibit macroscopic quantum effects at dilution refrigerator temperatures and might display interesting interactions with thermal phonons with the same range of frequencies. 1 Other authors have reported recipes for fabricating submicron suspended Si structures. 2,3 These recipes are somewhat more complicated and require more extensive processing equipment than the method we describe here. The final undercut step of the suspended structures is performed in our recipe by using a dry etch process, which avoids potential damage due to surface tension encountered in wet etch processes. We first describe the method used to fabricate suspended structures, and then describe the method used to measure the resonance properties of simple doubly clamped beams and show data for one such structure.We used ͗100͘ orientation, nominally undoped n-type Si wafers with a resistivity at 298 K of Ͼ1000 ⍀ cm. The substrates were cleaned, and on them a 1 m SiO 2 layer was grown by pyrogenic steam oxidation for 1 h at 1100°C, with O 2 flowing at 0.4 scfm through water at 95°C; this oxide layer serves as a mask for the isotropic reactive ion etching ͑RIE͒ of the Si substrate, the step that undercuts the suspended structures.Large area contact pads were defined by optical lithography. A 100-nm-thick layer of Ni was rf sputtered onto a liftoff pattern, and the photor...

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confidence: 99%

Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals

Cleland¹,

Roukes²

1996

Applied Physics Letters

498

362

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“…A number of linear micro actuators, electrothermal [6], electromagnetic [7][8], electrostatic [9][10] have been demonstrated in MOEMS. The performance of these actuators has been limited [6][7][8][9][10].…”

Section: Micro-opto-electro Mechanical Systemsmentioning

confidence: 99%

Development of a MEMS repulsive actuator for large out-of-plane force

Khan¹,

Mrad²

2014

J. Micromech. Microeng.

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This thesis describes the development of a MEMS repulsive actuator capable of producing a large out-of-plane force. Existing MEMS repulsive actuators are low out-of-plane force actuators that are unable to support or lift a mass of 1 mg. A high force MEMS repulsive actuator was developed to overcome this limitation. The design was optimized employing parameters of the actuator's fingers to increase the out-of-plane force. A design was developed based on the analytical results derived from extending the mathematical model of an existing actuator. A commercial manufacturing process, PolyMUMPs, was used to fabricate a prototype which was tested to validate the analytical and computational results. The prototype achieved an out-of-plane displacement of 15 µm and a 0.2° angular rotation. The resonance frequency was 120 Hz, and the rise and fall times were measured as 14.5 ms and 3625 ms (3.6 sec), respectively. The estimated out-of-plane force is 40 µN.iii ACKNOWLEDGEMENT

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“…Their application spans the range from linear actuation (Tang et al, 1990), through rotational actuation (Sniegowski and Garcia, 1996), accelerometry (Yun et al, 1992), scanning probes (Yao et al, 1992), gyroscopes (Pisano, 1989), RF filtering (Wang and Nguyen, 1999) and microgripping (Kim et al, 1990). It is natural, therefore, that considerable interest and effort have been invested in their improvement.…”

Section: Introductionmentioning

confidence: 99%

Analysis of electrostatic comb-driven actuators in linear and nonlinear regions

Tilleman¹

2004

International Journal of Solids and Structures

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Fabrication of high frequency two-dimensional nanoactuators for scanned probe devices

Cited by 71 publications

References 24 publications

Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals

Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals

Development of a MEMS repulsive actuator for large out-of-plane force

Analysis of electrostatic comb-driven actuators in linear and nonlinear regions

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