2008
DOI: 10.1088/0960-1317/18/8/085002
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Fabrication of high-density micro holes by upward batch micro EDM

Abstract: A large number of micro holes are needed for biomedical parts, ink-jet nozzles and micro droplet spraying parts. In this study, an inexpensive machining approach for producing a batch of micro holes is proposed. A set of previously introduced w-EDM mechanisms is employed to horizontally cut the batch micro electrodes precisely. Through the process arrangement, the micro electrodes and workpiece are not unloaded, repositioned and re-corrected until all the tasks are completed. The micro workpiece is clamped ont… Show more

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Cited by 35 publications
(21 citation statements)
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“…Risers were similarly drilled between a brittle coating surface to an underlying 3-D printed matrix for fluid access [62]. The broader field of microfluidics has similarly used CNC (computer numeric control) milling to achieve features 100 mm to 1 mm in diameter [63,64] or EDM (electrical discharge machining) to produce features on the order of 10 mm [65,66].…”
Section: Subtractive Manufacturing Processesmentioning
confidence: 99%
“…Risers were similarly drilled between a brittle coating surface to an underlying 3-D printed matrix for fluid access [62]. The broader field of microfluidics has similarly used CNC (computer numeric control) milling to achieve features 100 mm to 1 mm in diameter [63,64] or EDM (electrical discharge machining) to produce features on the order of 10 mm [65,66].…”
Section: Subtractive Manufacturing Processesmentioning
confidence: 99%
“…Once constructed the network was embedded into a epoxy matrix with the wax based inks being removed by temperature liquefaction and vacuum. Forming these microvascular network within a domain body can also be achieved by CNC machines that 'are capable of producing feature sizes on the order of tens of microns, Chen [22] or the application of micromachining technology to fabricate the network 'microchannels in a layer by layer fabrication approach' Saxena [23] at a sub-micron resolution. However the innovation of nano-materials, for example the potential of graphene could be the innovation of network mediums.…”
Section: Materials Adaptivitymentioning
confidence: 99%
“…Furthermore, Egashira and Mizutani (2002) used the micro-tools with a D-shaped cross-section and cutting edge of 0.5 m to mechanically drilling micro-hole with diameter of 22 m and depth of 90 m in monocrystalline silicon. Furthermore, Chen (2008) applied wire electrical discharge machining (WEDM) to manufacture micro-pin array of tungsten carbide with a square section of 21 m × 21 m, in which the pitch is 45 m and the total number of pins is 100 (10 × 10). This micro-pin array was further used to fabricate a square array of micro-holes by micro-0924-0136/$ -see front matter © 2010 Elsevier B.V. All rights reserved.…”
Section: Introductionmentioning
confidence: 99%
“…Fofonoff et al (2004) used brass wires of Ø100 m for WEDM to produce polygonal micro-pin arrays. The number of micro-pins can be from dozens to 1141 with a minimum side length of 80 m and a pitch of 170 m. Chen (2008) conducted WEDM with brass wires of Ø20 m to manufacture a square-section micro-pin array of tungsten carbide with the number of 100 (10 × 10). The side length of the square section of the micro-pins is 21 m and their length and pitch are 709 m and 45 m, respectively.…”
Section: Introductionmentioning
confidence: 99%