Fabrication of High-Aspect-Ratio Electrode Arrays for Three-Dimensional Microbatteries

Chamran, F.; Yeh, Yu-Ting; Min, Hong‐Shick; Dunn, Bruce; Kim, Chang‐Jin

doi:10.1109/jmems.2007.901638

Cited by 88 publications

(72 citation statements)

References 15 publications

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“…When a membrane is attached to a substrate with a patterned metal fi lm, electrodeposition can be selectively performed in the pores of the membrane that ends at the connected metallic pattern. [ 239 ] When the metallic rods are formed by this templated deposition to serve as current collectors for a solid state battery, the resistance of these current use of this method is widespread for various applications but its use for all-solid-state microbatteries is limited. Owen et al have reported that several materials prepared, based on micelle template deposition can be used as components for lithium-ion batteries.…”

Section: Three-dimensional Substrates Based On Templated Depositionmentioning

confidence: 99%

All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

Oudenhoven

Baggetto

Notten

2010

Advanced Energy Materials

690

638

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With the increasing importance of wireless microelectronic devices the need for on-board power supplies is evidently also increasing. Possible candidates for microenergy storage devices are planar all-solid-state Li-ion microbatteries, which are currently under development by several start-up companies. However, to increase the energy density of these microbatteries further and to ensure a high power delivery, three-dimensional (3D) designs are essential. Therefore, several concepts have been proposed for the design of 3D microbatteries and these are reviewed. In addition, an overview is given of the various electrode and electrolyte materials that are suitable for 3D all-solidstate microbatteries. Furthermore, methods are presented to produce fi lms of these materials on a nano-and microscale.www.MaterialsViews.com REVIEW www.advenergymat.de

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Section: Three-dimensional Substrates Based On Templated Depositionmentioning

confidence: 99%

All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

Oudenhoven

Baggetto

Notten

2010

Advanced Energy Materials

690

638

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“…The use of silicon micromachining techniques has revealed of great importance for the manufacturing of high aspect ratio electrode arrays that could be easily integrated in MEMS devices [40,49]. The process named C-MEMS (discussed also in the previous paragraph), allowed the manufacturing of 3D anodes and of combined microstructures coated with MCMB particles [50].…”

Section: D-mlibs Supported On Perforated Substratesmentioning

confidence: 99%

“…The process named C-MEMS (discussed also in the previous paragraph), allowed the manufacturing of 3D anodes and of combined microstructures coated with MCMB particles [50]. 3D interdigitated arrays of Ni and Zn were fabricated by micromolding and subsequent etching of the mold and then used to build a functional battery [49]. Vanadium oxide nanorolls and MCMB electrode arrays prepared in the same way, showed a reversible intercalation of lithium [49].…”

Section: D-mlibs Supported On Perforated Substratesmentioning

confidence: 99%

“…3D interdigitated arrays of Ni and Zn were fabricated by micromolding and subsequent etching of the mold and then used to build a functional battery [49]. Vanadium oxide nanorolls and MCMB electrode arrays prepared in the same way, showed a reversible intercalation of lithium [49]. The C-MEMS fabrication process was also extended to the preparation of a positive electrode array of PPYDBS deposited on carbon rods.…”

Section: D-mlibs Supported On Perforated Substratesmentioning

confidence: 99%

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Latest advances in the manufacturing of 3D rechargeable lithium microbatteries

Ferrari

Loveridge

Beattie

et al. 2015

Journal of Power Sources

224

199

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full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. A note on versions:The version presented here may differ from the published version or, version of record, if you wish to cite this item you are advised to consult the publisher's version. Please see the 'permanent WRAP url' above for details on accessing the published version and note that access may require a subscription.For more information, please contact the WRAP Team at: publications@warwick.ac.uk

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“…Efforts to improve microbattery performance have focused on increasing the electrode surface area and active material loading in the third dimension. Electrodes based on high-aspect-ratio micropillar structures, realized via methods including electrodeposition, polymer pyrolysis, and vapor deposition techniques, have been demonstrated (10)(11)(12)(13)(14). Despite the improved energy density compared with 2D batteries, because the micropillar electrodes are solid, the power and effective energy density is still limited due to the resultant long ion and electron diffusion pathways.…”

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confidence: 99%

Holographic patterning of high-performance on-chip 3D lithium-ion microbatteries

Ning

Zhang

et al. 2015

Proc. Natl. Acad. Sci. U.S.A.

193

165

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As sensors, wireless communication devices, personal health monitoring systems, and autonomous microelectromechanical systems (MEMS) become distributed and smaller, there is an increasing demand for miniaturized integrated power sources. Although thinfilm batteries are well-suited for on-chip integration, their energy and power per unit area are limited. Three-dimensional electrode designs have potential to offer much greater power and energy per unit area; however, efforts to date to realize 3D microbatteries have led to prototypes with solid electrodes (and therefore low power) or mesostructured electrodes not compatible with manufacturing or on-chip integration. Here, we demonstrate an on-chip compatible method to fabricate high energy density (6.5 μWh cm −2 ·μm −1 ) 3D mesostructured Li-ion microbatteries based on LiMnO 2 cathodes, and NiSn anodes that possess supercapacitor-like power (3,600 μW cm −2 ·μm −1 peak). The mesostructured electrodes are fabricated by combining 3D holographic lithography with conventional photolithography, enabling deterministic control of both the internal electrode mesostructure and the spatial distribution of the electrodes on the substrate. The resultant full cells exhibit impressive performances, for example a conventional light-emitting diode (LED) is driven with a 500-μA peak current (600-C discharge) from a 10-μm-thick microbattery with an area of 4 mm 2 for 200 cycles with only 12% capacity fade. A combined experimental and modeling study where the structural parameters of the battery are modulated illustrates the unique design flexibility enabled by 3D holographic lithography and provides guidance for optimization for a given application.energy storage | microelectronics | miniature batteries | lithium-ion batteries | interference lithography M icroscale devices typically use power supplied off-chip because of difficulties in miniaturizing energy storage technologies (1, 2). However, a miniaturized on-chip battery would be highly desirable for applications including autonomous microelectromechanical systems (MEMS)-based actuators, microscale wireless sensors, distributed monitors, and portable and implantable medical devices (3-8). For many of the applications, high energy density, high power density (charge and/or discharge), or some combination of high energy and power densities is required, all characteristics which can be difficult to achieve in a microbattery due to size and footprint restrictions, and process compatibilities with the other steps required for device fabrication. Although 2D thin-film microbatteries (typical thickness of a few micrometers) can deliver high power, they require large (often cm 2 ) footprints to provide reasonable energies (9). Making the electrodes thicker boosts the theoretical areal energy density but the resultant increases in electron and ion diffusion lengths reduce the effective power and energy densities. Efforts to improve microbattery performance have focused on increasing the electrode surface area and active material loading...

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Fabrication of High-Aspect-Ratio Electrode Arrays for Three-Dimensional Microbatteries

Cited by 88 publications

References 15 publications

All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

Latest advances in the manufacturing of 3D rechargeable lithium microbatteries

Holographic patterning of high-performance on-chip 3D lithium-ion microbatteries

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