Fabrication of hierarchical nanostructures using free-standing trilayer membrane

Stencil Lithography for Scalable Micro- and Nanomanufacturing

“…One-step plasma etching can be used to fabricate hierarchical nanostructures; however, the feature size and period cannot be controlled precisely [ 108 , 109 ]. Using the tri-layer membrane as a stencil mask, we have also developed a new fabrication scheme of making large-area hierarchical nanostructures [ 110 ].…”

“…In order to create high aspect ratio nanoholes on the silicon microstructures, DRIE was directly applied through the nanopores of the tri-layer stencil mask. The SEM images of the high aspect ratio nanopillars featured on microtrenches and nanoholes on microgratings are shown in Figure 10 c,d, respectively [ 110 ].…”

“…Such hierarchical nanostructures are very useful in biomedical applications such as nucleic acid detection, tracking, and patterning [ 111 , 112 , 113 ]. A SEM image of such hierarchical nanostructures is shown in Figure 10 e [ 110 ].…”

“…Copyright [2012], American Vacuum Society; ( b ) image of a tri-layer membrane placed on microhole-patterned silicon substrate. Reprinted with permission from [ 110 ]. Copyright [2013], American Vacuum Society; ( c ) SEM image of the hierarchical nanopillar structures formed on top of the microhole structures.…”

Fabrication of Self-standing Polystyrene Thin Films with Fine Through Holes by use of Water Soluble Resin Sacrificial Layer

“…Self-standing membranes with well-defined through-holes have wide applications such as microfiltration [1], gas exchange [2], stencil masks [3][4][5]. Self-standing membranes with well-defined through-holes have been fabricated by use of micro fabrication process based on silicon technology [6][7][8][9][10]. Membrane with very high aspect through-holes was also fabricated by anodic porous alumina [11].…”