Fabrication of Gold Microelectrodes on a Glass Substrate by Femtosecond-Laser-Assisted Electroless Plating

Abstract

The absence of on-line monitoring and process quality assurance is one of the main obstacles for wide implementation of Selective Laser Melting technology in modern manufacturing industry. Temperature monitoring in the laser impact zone are carried out by an originally developed bicolour pyrometer and CCD camera which are integrated with the optical scanning system of the PHENIX PM-100 machine. Experiments are performed with variation of basic process parameters such as powder layer thickness (0-120 µm), hatch distance (60 µm-1000 µm), and fabrication strategy (the so-called "one-zone" and "two-zone").

Vertical sidewall electrodes monolithically integrated into 3D glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis

“…Additionally, this sidewall metal patterning technique has the potential to be extended to other transparent substrates such as fused silica, where the space-selective patterning of catalysis seeds on microuidic structures using fs-laser assisted modication can be performed. [58][59][60]…”

One-Stage Femtosecond Laser-Assisted Deposition of Gold Micropatterns on Dielectric Substrate

“…As gold has excellent chemical stability and physical properties, the direct laser writing of gold micropatterns is essential for the fabrication of microelectronic components, microheaters [ 10 ], molecular sensors [ 11 ], and surface-enhanced Raman scattering (SERS) substrates [ 12 ]. On the other hand, to date, the investigations of femtosecond laser-assisted gold deposition on the dielectric substrate are very limited and are mainly represented by multistage and time-consuming procedures [ 13 , 14 ] or include the use of complex Au-containing photoresists or solutions which enable the multiphoton photoreduction [ 15 ]. Moreover, until now, the gold micropatterning was shown only as the surface gold deposition.…”