2014
DOI: 10.1088/0960-1317/24/8/085003
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Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology

Abstract: A micro-opto-mechanical system (MOMS) technology for the fabrication of fiber-optic optoacoustic emitters is presented. The described devices are based on the thermoelastic generation of ultrasonic waves from patterned carbon films obtained by the controlled pyrolysis of photoresist layers and fabricated on miniaturized single-crystal silicon frames used to mount the emitters on the tip of an optical fiber. Thanks to the micromachining process adopted, high miniaturization levels are reached in the fabrication… Show more

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Cited by 20 publications
(8 citation statements)
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“…A variety of methods have been reported for optical ultrasound transmitter fabrication. These include techniques such as dip-coating, 2,4 spin-coating, 15 chemical vapor deposition, 11,14,16 metal evaporation, 6 and etching 12,17 . Dip-coated and spin-coated absorber-elastomer composites on glass substrates have been implemented for fabrication of carbonaceous optical ultrasound generating surfaces 1,2,16 .…”
mentioning
confidence: 99%
See 1 more Smart Citation
“…A variety of methods have been reported for optical ultrasound transmitter fabrication. These include techniques such as dip-coating, 2,4 spin-coating, 15 chemical vapor deposition, 11,14,16 metal evaporation, 6 and etching 12,17 . Dip-coated and spin-coated absorber-elastomer composites on glass substrates have been implemented for fabrication of carbonaceous optical ultrasound generating surfaces 1,2,16 .…”
mentioning
confidence: 99%
“…These include techniques such as dip-coating, 2,4 spin-coating, 15 chemical vapor deposition, 11,14,16 metal evaporation, 6 and etching. 12,17 Dip-coated and spin-coated absorber-elastomer composites on glass substrates have been implemented for fabrication of carbonaceous optical ultrasound generating surfaces. 1,2,16 Electrospun carbonized polyacrylonitrile nanofibers deposited on macroscale substrates (a flat glass slide and a concave lens) and then spin-coated with PDMS were also reported for laser ultrasound generation.…”
mentioning
confidence: 99%
“…Laser ultrasonic emitters are based on the optoacoustic effect and can generate ultra-broadband ultrasonic pulses [1][2]. The optoacoustic effect, also known as photoacoustic effect, consist in the generation of the ultrasonic pulses by an optical absorbing medium that is illuminated by short optical pulses.…”
Section: Introductionmentioning
confidence: 99%
“…Existing efforts to generate ultrasound via optical fibers have been focused on using chemical coatings, e.g., gold nanocomposites, 16 or preparing micro-machined attachments for fiber tips. 17 However, the tension achieved via these acoustic emitters is far below the tensile stress needed to induce cavitation.…”
mentioning
confidence: 99%