Fabrication of diamond diffractive optics for powerful CO2 lasers via replication of laser microstructures on silicon template

Kononenko, T. V.; Sovyk, D. N.; Pivovarov, P. A.; Pavelyev, V. S.; Меженин, А. В.; Cherepanov, K. V.; Комленок, М. С.; Sorochenko, V. R.; Khomich, А.А.; Pashinin, Vladimir P.; Ashkinazi, E. E.; Ralchenko, V. G.; Konov, V. I.

doi:10.1016/j.diamond.2019.107656

Cited by 16 publications

(6 citation statements)

References 33 publications

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“…In order to achieve optical quality, the surface roughness required for small scattering loss is typically less than 1/10 of the operating wavelength. For optical components for the infrared and longer wavelengths, mechanically polished PCD substrates are in general sufficiently smooth [33]. For optical components for the UV-Visible range, SCD substrates are preferred as they manifest much lower material absorption, however, mechanical polishing of SCD can be problematic due to a strong anisotropy of the polishing rate, which can result in undesired surface roughness with abundant polishing pits [32,34].…”

Section: Diamond Substrates and Materials Propertiesmentioning

confidence: 99%

“…For diffractive optics fabricated out of resin, molding can be a competitive fabrication method [42]. A closely related method to molding consists in template growth, which has been employed with success for polycrystalline diamond [3,33]. A growth substrate (such as a silicon wafer) is shaped (e.g.…”

Section: Diamond Micro-and Nanofabricationmentioning

confidence: 99%

“…Kononenko et al [33] demonstrate far infrared (CO 2 wavelength) components by a novel combination of laser microstructuring and diamond growth. A silicon template is structured using pulsed laser machining to form the inverse of the desired surface, then polycrystalline diamond is grown over the template after the template is seeded with nanodiamonds.…”

Section: Far-and Mid-infraredmentioning

confidence: 99%

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Diamond diffractive optics—recent progress and perspectives

Kiss

Huszka

et al. 2020

Advanced Optical Technologies

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Diamond is an exceptional material that has recently seen a remarkable increase in interest in academic research and engineering since high-quality substrates became commercially available and affordable. Exploiting the high refractive index, hardness, laser-induced damage threshold, thermal conductivity and chemical resistance, an abundance of applications incorporating ever higher-performance diamond devices has seen steady growth. Among these, diffractive optical elements stand out—with progress in fabrication technologies, micro- and nanofabrication techniques have enabled the creation of gratings and diffractive optical elements with outstanding properties. Research activities in this field have further been spurred by the unique property of diamond to be able to host optically active atom scale defects in the crystal lattice. Such color centers allow generation and manipulation of individual photons, which has contributed to accelerated developments in engineering of novel quantum applications in diamond, with diffractive optical elements amidst critical components for larger-scale systems. This review collects recent examples of diffractive optical devices in diamond, and highlights the advances in manufacturing of such devices using micro- and nanofabrication techniques, in contrast to more traditional methods, and avenues to explore diamond diffractive optical elements for emerging and future applications are put in perspective.

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Section: Diamond Substrates and Materials Propertiesmentioning

confidence: 99%

Section: Diamond Micro-and Nanofabricationmentioning

confidence: 99%

Section: Far-and Mid-infraredmentioning

confidence: 99%

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Diamond diffractive optics—recent progress and perspectives

Kiss

Huszka

et al. 2020

Advanced Optical Technologies

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“…Diamond films have been applied to fields such as aircraft windows due to their resistance to sand erosion, hydrophobic properties and high transmittance in the infrared band [1][2][3][4][5]. When the aircraft speed reaches the sonic level, the thermal ablation effect must be considered, which will cause high-temperature plasma ablation on the windows and other parts [6-Corresponding author: *guoks@jihualab.ac.cn 8].…”

Section: Introductionmentioning

confidence: 99%

Effect of multicomponent alloy coating on high frequency plasma ablation of diamond films

Pan,

Guo,

Liu

et al. 2023

AOPC 2023: Optical Spectroscopy and Imaging; And Atmospheric and Environmental Optics

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“…Laser processing is a widely used, non-contact machining technique using highly intense lasers, [27,28] which provides an alternative approach for high precision surface polishing. [29] There is a continuing interest in the use of laser to polish diamond or fabricate diamond microstructures because the nature of lasermatter interaction can effectively overcome the challenges of its high hardness, [30][31][32][33] as well as drawbacks of the mechanical polishing. Laser polishing of diamond has been extensively studied by a variety of laser sources spanning from continuous to pulsed lasers with wide wavelengths ranging from infrared (IR) to ultraviolet (UV).…”

mentioning

confidence: 99%

Optical Quality Laser Polishing of CVD Diamond by UV Pulsed Laser Irradiation

Liu

Lin

Hong

2021

Advanced Optical Materials

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It is a great technical challenge to precisely polish diamond substrates due to their extremely high hardness, especially for micro‐optics fabrication. Here, a simple laser polishing process is demonstrated for the optical quality surface finish of chemical vapor deposition diamond using a 355 nm nanosecond laser. Raman spectroscopy and surface profile analyses reveal that the laser polishing is an ablation‐based process that consists of laser graphitization and the subsequent laser ablation of the graphitized layer. An optimized strategy is proposed to realize the high‐quality polishing by combining the ablation effect and defocusing laser irradiation. The polishing strategy can effectively reduce the peak‐to‐valley height difference of a rough surface and automatically enables the laser fluence at a low level close to the ablation threshold. Laser polishing at such critical laser fluence can greatly avoid harmful effects caused by high laser fluence and achieve precision materials’ removal while maintaining optical surface quality. The approach is capable of delivering an average roughness Ra down to 8.02 nm and a high transmittance up to 80% of mechanically polished diamond in the visible spectrum. High optical performances make it possible to directly fabricate micro‐optical components on diamond substrates using this novel laser polishing approach.

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Fabrication of diamond diffractive optics for powerful CO2 lasers via replication of laser microstructures on silicon template

Cited by 16 publications

References 33 publications

Diamond diffractive optics—recent progress and perspectives

Diamond diffractive optics—recent progress and perspectives

Effect of multicomponent alloy coating on high frequency plasma ablation of diamond films

Optical Quality Laser Polishing of CVD Diamond by UV Pulsed Laser Irradiation

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