Fabrication of dense flow sensor arrays on flexible membranes

Izadi, N.; Boer, Meint J. de; Berenschot, J.W.; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Jansen, Henricus V.; Mogdans, Joachim; Krijnen, Gijs

doi:10.1109/sensor.2009.5285945

Cited by 8 publications

(7 citation statements)

References 6 publications

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“…With the exception of the hot-wire array presented by Yang et al [28], biomimetic approaches picked up fluid motion by means of a flow-induced deflection of a cantilever-like or lamella-shaped structure (an artificial cupula), which was detected by piezo-electric [38], resistive [39][40][41][42][43], capacitive [44][45][46], ionic polymer-metal composite (IPMC)-based [29,47] or optical [48][49][50][51] read-out techniques.…”

Section: Biomimetic Flow Sensors: State Of the Artmentioning

confidence: 99%

“…Unfortunately, Krijnen et al [45,61] did not test their sensor in an aquatic environment. The capacitive detection principle was also used to fabricate bioinspired sensors based on fish SNs that contained an SU-8 hair cell [46,62]. Some flow sensors are based on the piezo-electric or depolarization detection principle [47,[63][64][65][66].…”

Section: Biomimetic Flow Sensors: State Of the Artmentioning

confidence: 99%

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Micro-Machined Flow Sensors Mimicking Lateral Line Canal Neuromasts

et al. 2015

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Fish sense water motions with their lateral line.The lateral line is a sensory system that contains up to several thousand mechanoreceptors, called neuromasts. Neuromasts occur freestanding on the skin and in subepidermal canals. We developed arrays of flow sensors based on lateral line canal neuromasts using a biomimetic approach. Each flow sensor was equipped with a PDMS (polydimethylsiloxane) lamella integrated into a canal system by means of thick-and thin-film technology. Our artificial lateral line system can estimate bulk flow velocity from the spatio-temporal propagation of flow fluctuations. Based on the modular sensor design, we were able to detect flow rates in an industrial application of tap water flow metering. Our sensory system withstood water pressures of up to six bar. We used finite element modeling to study the fluid flow inside the canal system and how this flow depends on canal dimensions. In a second set of experiments, we separated the flow sensors from the main stream by means of a flexible membrane. Nevertheless, these biomimetic neuromasts were still able to sense flow fluctuations. Fluid separation is a prerequisite for flow measurements in medical and pharmaceutical applications.

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Section: Biomimetic Flow Sensors: State Of the Artmentioning

confidence: 99%

Section: Biomimetic Flow Sensors: State Of the Artmentioning

confidence: 99%

Micro-Machined Flow Sensors Mimicking Lateral Line Canal Neuromasts

et al. 2015

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“…In recent years, with the development of social science and technology, human beings are developing faster and faster in flexible strain sensors and related fields. As a research branch of flexible strain sensors [1][2][3][4][5][6], electronic skin is directly related to the intelligent and multifunctional carriers such as robots, medical equipment, human prosthesis and wearable devices. It has been highly valued by multidisciplinary researchers and has become one of the hot topics of international academic research studies [7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Study on the performance of temperature‐stabilised flexible strain sensors based on silver nanowires

Zhang

Zhuo

et al. 2019

Micro & Nano Letters

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Nowadays, flexible strain sensors applied in the fields of health care and electronic skin have been widely studied and applied. In fact, the temperature characteristic of flexible strain sensors based on metal nanomaterials is rarely concerned. In this work, the ohmic and tensile properties of the flexible strain sensor based on silver nanowires-polydimethylsiloxane were tested and it was found that the sensor has good ohmic characteristics and a maximum gauge factor of 536.98. In addition, the resistance of the sensor was affected little by temperature when the temperature environment of the sensor was changed, and the resistance temperature coefficient of the flexible strain sensor is −1050 ppm/°C. Furthermore, it was found that the sensor was sensitive to minute strain when the sensors were applied to the two application tests of strain and pulse.

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“…3 Fan et al from the University of Illinois at Urbana-Champaign report the development of micro machined, distributed flow sensors based on the fish lateral line sensors. 4 Izadi et al 5 in Universitat Bonn report the fabrication of aquatic hair based flow sensors inspired by fish lateral line.…”

Section: Introductionmentioning

confidence: 99%

Advanced enhancement model of bionics fish cilia MEMS vector hydrophone-systematic analysis review

Eb¹,

Thangavel²

2018

MOJABB

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A bionic fish cilia median-low frequency three-dimensional MEMS vector hydrophone is reported in this paper. The piezo resistive reasonable position was obtained through finite element analysis by ANSYS and the structure was formed by MEMS processes including lithography, ion implantation, PECVD and etching etc. The standing wave barrel results show that the lowest sensitivity of the hydrophone is -200 dB and reach up to -160 dB (in which the voltage amplification factor is 300). It has a good frequency response characteristics in 25 Hz ∼1500 Hz band. Directivity tests displayed that the hydrophone has a good "8"-shaped directivity, in which the resolution is not less than 30 dB, and asymmetry of the maximum axial sensitivity value is less than 1.2 dB and this hydrophone has a good directional pattern in form of "8"-shapes. The experiment results show that the receiving sensitivity of the hydrophone is 197.7 dB (0 dB ¼ 1V/mPa). The novel hydrophone not only possesses satisfactory directional pattern as well as miniature structure, but also has good low-frequency characteristics, and satisfies the requirements for low-frequency acoustic measurement. Keywords

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Fabrication of dense flow sensor arrays on flexible membranes

Cited by 8 publications

References 6 publications

Micro-Machined Flow Sensors Mimicking Lateral Line Canal Neuromasts

Micro-Machined Flow Sensors Mimicking Lateral Line Canal Neuromasts

Study on the performance of temperature‐stabilised flexible strain sensors based on silver nanowires

Advanced enhancement model of bionics fish cilia MEMS vector hydrophone-systematic analysis review

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