Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology 2017
DOI: 10.1117/12.2277818
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Fabrication of cylindrical micro-parts using synchronous rotary scan-projection lithography and chemical etching

Kaiki Ito
1
,
Yuta Suzuki
2
,
Toshiyuki Horiuchi
3
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