Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

Scaiola, Davide; Stassi, Stefano; Calmo, Roberta; Maillard, Damien; Varricchio, Stefano S. G.; Pastina, Annalisa De; Villanueva, G.; Renaud, Philippe; Ricciardi, Carlo

doi:10.1016/j.mee.2020.111395

Cited by 3 publications

(3 citation statements)

References 27 publications

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“…Figure 1 shows design and fabrication processes of the proposed doubly clamped microfluidic resonators with two embedded parallel channels. Proposed microfluidic resonators are batch fabricated with a set of 4-inch silicon wafers by deposition, etching, and sacrificial process [7,8]. Silicon nitride and polycrystalline silicon are sequentially deposited by low pressure chemical vapor deposition (LPCVD).…”

Section: Fabricationmentioning

confidence: 99%

Microfluidic resonators with two parallel channels for independent sample loading and effective density tuning

Lee

Khan²,

Thundat

et al. 2020

Micro and Nano Syst Lett

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This paper reports doubly clamped microchannel embedded resonators with two independent and parallel channels integrated for effective sample density tuning for the first time. With the aid of such a unique design, each fluidic channel can be independently accessed thus different liquid samples can be loaded simultaneously. The proposed fluidic resonators are batch fabricated by depositing silicon nitride, polysilicon, and silicon nitride sequentially on top of a set of 4-inch silicon wafers and sacrificing the middle polysilicon layer with potassium hydroxide (KOH). The sacrificial process defines two parallel channels and releases doubly clamped beam resonators simultaneously. In addition, an off-chip vacuum clamp with optical and fluidic access is custom-made to operate each resonator with enhanced quality factor. The microfluidic resonators mounted on the custom vacuum clamp are thoroughly characterized with a laser Doppler vibrometer and used to measure the effective sample density ranging from 395 to 998 kg/m3.

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Section: Fabricationmentioning

confidence: 99%

Microfluidic resonators with two parallel channels for independent sample loading and effective density tuning

Lee

Khan²,

Thundat

et al. 2020

Micro and Nano Syst Lett

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“…22,23,107,[189][190][191][192] The group of Carlo Ricciardi and the group of Jungchul Lee have developed effective fabrication processes for SMR [193][194][195] and suspended nanochannel resonator. 196 Viscosity measurements performed using SMR was also demonstrated by the group of Jungchul Lee. 197 5.4.1.…”

Section: Applications Of Smrmentioning

confidence: 89%

Advanced density-based methods for the characterization of materials, binding events, and kinetics

Doan-Nguyen

Crespy

2022

Chem. Soc. Rev.

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“…At present, the fabrication methods for nano-channels mainly include high-resolution machining technology [ 13 , 14 , 15 ], sacrificing layer technology [ 16 , 17 ], the crack method [ 18 , 19 ], PDMS deformation [ 20 , 21 ], molecular self-assembly [ 22 , 23 , 24 ], and nano-imprinting technology [ 25 , 26 , 27 ]. The high-resolution machining technology mentioned above uses nanoscale resolution to expose or directly write nano-channels on the substrate, which provides the advantages of flexibility, controllability, high accuracy, and good quality.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition

2023

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A low-cost method of fabrication of high aspect ratio nano-channels by thermal nano-imprinting and Parylene deposition is proposed. SU-8 photoresist nano-channels were first manufactured by thermal nano-imprinting, and Parylene deposition was carried out to reduce the width of the nano-channels and increase the aspect ratio. During the process, the side walls of the SU-8 nano-channels were covered with the Parylene film, reducing the width of the nano-channels, and the depth of the channels increased due to the thickness of the Parylene film deposited on the surface of the SU-8 nano-channels, more so than that at the bottom. The influence of Parylene mass on the size of nano-channels was studied by theoretical analysis and experiments, and the deposition pressure of Parylene was optimized. The final high aspect ratio nano-channels are 46 nm in width and 746 nm in depth, of which the aspect ratio is 16. This simple and efficient method paves the way for the production of high aspect ratio nano-channels.

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Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

Cited by 3 publications

References 27 publications

Microfluidic resonators with two parallel channels for independent sample loading and effective density tuning

Microfluidic resonators with two parallel channels for independent sample loading and effective density tuning

Advanced density-based methods for the characterization of materials, binding events, and kinetics

Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition

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