Fabrication of black aluminium thin films by magnetron sputtering

More-Chevalier, J.; Novotný, Michal; Hruška, Petr; Fekete, Ladislav; Fitl, Přemysl; Bulı́ř, J.; Pokorný, Petr; Volfová, Lenka; Havlová, Š.; Vondráček, Martin; Lančok, J.

doi:10.1039/d0ra00866d

Cited by 13 publications

(18 citation statements)

References 50 publications

(77 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The B-Al surface is presented in Figure 4 a, and the B-Au surface is shown in Figure 4 b. RMS values of

and

are measured from the surface roughnesses of B-Al and B-Au films, respectively. The RMS value for B-Al is lower than those reported in our previous works, which were equal to

and

, respectively [ 11 , 12 ]. The mean difference between each result is the thickness of B-Al layers deposited previously of

and

, which are higher than the one deposited on the QCM sensors of 280 nm.…”

Section: Resultscontrasting

confidence: 72%

“…Black metals (BMs) are defined as highly porous nanocrystalline materials that can significantly trap incident light [ 11 , 12 , 13 ]. These porosities are introduced during the growth of the metal film due to the presence of impurities which creates a structure allowing complex subwavelength electromagnetic interactions with the light in wide wavebands [ 14 ].…”

Section: Introductionmentioning

confidence: 99%

“…These porosities are introduced during the growth of the metal film due to the presence of impurities which creates a structure allowing complex subwavelength electromagnetic interactions with the light in wide wavebands [ 14 ]. To date, BMs have found applications in electronics for optical sensing and imaging [ 14 , 15 , 16 ], heat radiators enhancement [ 17 , 18 , 19 ], electrochemical sensing and catalysis [ 20 ], solar cells [ 21 ], and energy harvesting [ 11 , 14 , 22 , 23 , 24 , 25 ]. Especially highly porous aluminum has attracted great interest in recent years [ 26 , 27 ].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Surface Enhancement Using Black Coatings for Sensor Applications

et al. 2022

Self Cite

View full text Add to dashboard Cite

The resolution of a quartz crystal microbalance (QCM) is particularly crucial for gas sensor applications where low concentrations are detected. This resolution can be improved by increasing the effective surface of QCM electrodes and, thereby, enhancing their sensitivity. For this purpose, various researchers have investigated the use of micro-structured materials with promising results. Herein, we propose the use of easy-to-manufacture metal blacks that are highly structured even on a nanoscale level and thus provide more bonding sites for gas analytes. Two different black metals with thicknesses of 280 nm, black aluminum (B-Al) and black gold (B-Au), were deposited onto the sensor surface to improve the sensitivity following the Sauerbrey equation. Both layers present a high surface roughness due to their cauliflower morphology structure. A high response (i.e., resonant frequency shift) of these QCM sensors coated with a black metal layer was obtained. Two gaseous analytes, H2O vapor and EtOH vapor, at different concentrations, are tested, and a distinct improvement of sensitivity is observed for the QCM sensors coated with a black metal layer compared to the blank ones, without strong side effects on resonance frequency stability or mechanical quality factor. An approximately 10 times higher sensitivity to EtOH gas is reported for the QCM coated with a black gold layer compared to the blank QCM sensor.

show abstract

“…The B-Al surface is presented in Figure 4 a, and the B-Au surface is shown in Figure 4 b. RMS values of

and

are measured from the surface roughnesses of B-Al and B-Au films, respectively. The RMS value for B-Al is lower than those reported in our previous works, which were equal to

and

, respectively [ 11 , 12 ]. The mean difference between each result is the thickness of B-Al layers deposited previously of

and

, which are higher than the one deposited on the QCM sensors of 280 nm.…”

Section: Resultscontrasting

confidence: 72%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Surface Enhancement Using Black Coatings for Sensor Applications

et al. 2022

Self Cite

View full text Add to dashboard Cite

show abstract

“…Black Al films were deposited on 1 mm thick fused silica substrates with dimensions of 10 × 10 mm using pulsed DC magnetron sputtering from an aluminum target (Al purity 99.99%) with a diameter of 100 mm in a mixed atmosphere of argon (94%) and nitrogen (6%). [ 17 ] The substrates were placed on an unheated substrate holder at a distance of 100 mm from the target. The working atmosphere pressure was 0.5 Pa.…”

Section: Methodsmentioning

confidence: 99%

“…The magnetron sputtering technique has the advantage of producing thin films on large‐area substrates and also allows efficient tuning of nano‐, micro‐, and macrostructures of the resulting films by changing the deposition parameters. [ 17 ] We investigate the effect of heating on surface morphology and structural changes of the fabricated Black Al films using scanning electron microscopy (SEM) and photothermally stimulated exoelectron emission (PTSE) spectroscopy. PTSE is a highly sensitive technique that allows identifying initial stages of changes in the surface structure of solids that occur during phase transitions.…”

Section: Introductionmentioning

confidence: 99%

Thermal Stability of Black Aluminum Films and Growth of Aluminum Nanowires from Mechanical Defects on the Film Surface during Annealing

Romanova

More-Chevalier

Novotný

et al. 2021

Physica Status Solidi (b)

Self Cite

View full text Add to dashboard Cite

The thermal stability of black aluminum (Black Al) films deposited on unheated fused silica substrates by pulsed DC magnetron sputtering is investigated. The deposited films have porous moth‐eye morphology and a relatively soft surface that can be easily damaged mechanically. Photothermally stimulated exoelectron emission (PTSE) spectra of the films have emission peaks at 180 and 300 °C, which can be associated with processes of aluminum recrystallization occurring at these temperatures. The total emitted charge of PTSE decreases according to a power law with each subsequent heating, indicating that the most pronounced structural changes on the film surface occur during its first annealing. The shape of the mechanically intact pores of the films does not change after heating. However, spiral‐shaped aluminum nanowires grow from scratches and abrasions on the film surface already after heating up to 200 °C due to the stress‐induced migration of aluminum atoms. When scratches are deliberately applied to the surface of an already annealed film, the nanowires do not grow when the film is reheated. The results of this study show that mechanically intact as‐deposited Black Al films are thermally stable up to temperatures of at least 400 °C.

show abstract

Self‐Oxidation Resistance of the Curved Surface of Achromatic Copper

Kim,

Lee

et al. 2023

Advanced Materials

View full text Add to dashboard Cite

Copper surfaces that exhibit a wide range of achromatic colors while still metallic have not been studied, despite advancements in antireflection coatings. A series of achromatic copper films grown with [111] preferred orientation by depositing three‐dimensional (3D) porous nanostructures is introduced via coherent/incoherent atomic sputtering epitaxy. The porous copper nanostructures self‐regulate the giant oxidation resistance by constructing a curved surface that generates a series of mono‐atomic steps, followed by shrinkage of the lattice spacing of one or two surface layers. First‐principles calculations confirm that these structural components cooperatively increase the energy barrier against oxygen penetration. The achromaticity of the single‐crystalline porous copper films is systematically tuned by geometrical parameters such as pore size distribution and three‐dimensional linkage. The optimized achromatic copper films with high oxidation resistance show an unusual switching effect between superhydrophilicity and superhydrophobicity. The tailored 3D porous nanostructures can be used for numerous applications, such as antireflection coatings, microfluidic devices, droplet tweezers, and reversible wettability switches.This article is protected by copyright. All rights reserved

show abstract

Fabrication of black aluminium thin films by magnetron sputtering

Abstract: A black aluminium film deposited by magnetron sputtering showed a high correlation of diffuse reflectivity with surface morphology and nitrogen content in plasma.

Cited by 13 publications

References 50 publications

Surface Enhancement Using Black Coatings for Sensor Applications

Surface Enhancement Using Black Coatings for Sensor Applications

Thermal Stability of Black Aluminum Films and Growth of Aluminum Nanowires from Mechanical Defects on the Film Surface during Annealing

Self‐Oxidation Resistance of the Curved Surface of Achromatic Copper

Contact Info

Product

Resources

About