2022
DOI: 10.1016/j.mee.2022.111776
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Fabrication of bifocal lenses using resin that can be processed by electron beam lithography after ultraviolet-nanoimprint lithography

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Cited by 10 publications
(4 citation statements)
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“…Adapted with permission. [ 70 ] Copyright 2022, Elsevier. Symmetric wrinkling patterns upon solvent swelling.…”
Section: What Are Oriented Wrinkles?mentioning
confidence: 99%
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“…Adapted with permission. [ 70 ] Copyright 2022, Elsevier. Symmetric wrinkling patterns upon solvent swelling.…”
Section: What Are Oriented Wrinkles?mentioning
confidence: 99%
“…Circular: c) Electron beam lithography and UV-nanoimprint lithography. Adapted with permission [70]. Copyright 2022, Elsevier.…”
mentioning
confidence: 99%
“…Over the past decades, Fresnel lenses have emerged as a key player in photonics, 3D displays, optical imaging, diffractive networks, high-dynamic all-focus imaging, and long-distance optical communication 1 7 . However, conventional Fresnel lenses are fabricated by electron-beam writing 8 , which has several drawbacks, such as these lenses often suffer from low diffraction efficiency due to electron-beam precision and speed limitations, especially for complex or large apertures. The focal length is fixed during fabrication, necessitating a complete redesign for any changes.…”
Section: Introductionmentioning
confidence: 99%
“…UV-NIL is a nanoscale pattern-transfer process that uses a release-coated mold with nanoscale patterns and a UV-curable resin [5]. UV-NIL has recently been used not only to pattern resins but also to transfer silver ink and fabricate devices [6][7][8][9][10][11][12][13]. In UV-NIL, the patterned mold is directly contacted with the UV-curing resin, which causes resin adhesion, leading to the formation of defects in the mold [14][15].…”
Section: Introductionmentioning
confidence: 99%