Fabrication of an electrowetting microlens array on a flexible subtrate

Grinsven, Kari L. Van; Ashtiani, Alireza Ousati; Jiang, Hongrui

doi:10.1109/transducers.2017.7994459

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2019

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“…While microlenses were typically fabricated on rigid structures, there has been significant work in recent years to construct tunable liquid lenses on flexible substrates [18,19,20,21]. Similarly, there has been a variety of research on tunable microlens arrays [22,23,24,25,26,27].…”

Section: Introductionmentioning

confidence: 99%

Flexible Electrowetting-on-Dielectric Microlens Array Sheet

2019

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We have fabricated a fully-flexible, focus-tunable microlens array on a sheet and demonstrated its imaging capabilities. Each liquid lens of the array is individually tunable via electrowetting on dielectric (EWOD) actuation and is situated on a polydimethylsiloxane (PDMS) substrate, which allows the lens array to operate as a reconfigurable optical system. In particular, we observed a significant increase in the field of view (FOV) of the system to 40.4° by wrapping it on a cylindrical surface as compared to the FOV of 21.5° obtained by the array on a planer surface. We also characterized the liquid lenses of the system, observing a range of focus length from 20.2 mm to 9.2 mm as increased voltage was applied to each EWOD lens. A Shack–Hartmann wavefront sensor (SHWS) was used to measure the wavefront of the lens as it was actuated, and the aberrations of the lens were assessed by reporting the Zernike coefficients of the wavefronts.

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