1999
DOI: 10.1007/s003390051514
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Fabrication of a Ti:sapphire planar waveguide by pulsed laser deposition

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Cited by 22 publications
(10 citation statements)
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“…Waveguides in diverse configurations can be fabricated by a few developed techniques, including metal‐ion indiffusion , ion/proton exchange , epitaxial layer deposition (sputtering, molecular beam epitaxy (MBE), chemical vapor deposition (CVD), pulsed laser deposition (PLD), etc.) , ion‐beam implantation/irradiation , and femtosecond (fs) laser micromachining/writing .…”
Section: Introductionmentioning
confidence: 99%
“…Waveguides in diverse configurations can be fabricated by a few developed techniques, including metal‐ion indiffusion , ion/proton exchange , epitaxial layer deposition (sputtering, molecular beam epitaxy (MBE), chemical vapor deposition (CVD), pulsed laser deposition (PLD), etc.) , ion‐beam implantation/irradiation , and femtosecond (fs) laser micromachining/writing .…”
Section: Introductionmentioning
confidence: 99%
“…In PLD, the radii of the nanoparticles that condensed from the gas phase ranged from a few nm to some tens of nm [ 5 , 6 ]. On the other hand, the droplets fabricated by PLD were some hundreds of nm in radius [ 7 ]. Using LIDT, nanoparticles with radii smaller than 250 nm can be fabricated [ 19 , 30 ].…”
Section: Resultsmentioning
confidence: 99%
“…Such nanoparticles have been fabricated by chemosynthesis [ 1 , 2 ], chemical-vapor deposition [ 3 ], electron-beam lithography [ 4 ], laser processing, etc. In laser processing, pulsed-laser deposition (PLD) [ 5 , 6 , 7 ] and local melting of thin films have been employed, with the latter technique using melting and re-solidification of the film [ 8 , 9 , 10 , 11 ]. For area processing by a Gaussian beam, the particle sizes are dispersed due to the Rayleigh instability criterion [ 8 ].…”
Section: Introductionmentioning
confidence: 99%
“…The achievement of waveguide structures in ZnO material makes it possible to extend its application in light emitter devices and can provide more choice in the design of ZnO microdevices. There are a few technics to produce waveguides in optical materials, such as ion exchange [11,12], epitaxial film deposition [13,14], sol-gel [15], ion implantation/irradiation [16][17][18][19] and pulsed laser writing [20][21][22][23], etc. Among these, ion beam technique is an efficient and highly controllable method, and it does not rely on the chemical properties of the target materials [24].…”
Section: Introductionmentioning
confidence: 99%