We propose and demonstrate a hybrid lithographic technique capable of nano-patterning surfaces by optothermal decomposition of a polymeric film induced by a single metal nanoparticle. A tightly-focused laser beam exerting a strong optical force onto the nanoparticle is used to move it inside the polymer film. Due to efficient plasmonic absorption of the laser light the nanoparticle is heated up to temperatures of several hundred degrees, causing melting or even thermal decomposition of the polymer film. By this method grooves less than 100 nm wide and tens-ofmicrometers long can be directly milled in a polymer layer.
Keywords nanofabrication; metal nanoparticle; optical forces; plasmonic heatingThere is an increasing demand for technologies capable of patterning surfaces at the nanoscale with high precision, high throughput and in a cost-effective manner. For many applications the desired patterning accuracy can be achieved using electron-beam 1,2 and ionbeam 3,4 lithography or scanning-probe methods 5 based on scanning tunneling microscopy 6 and/or atomic force microscopy 7 techniques. The simplest and most straightforward scanning-probe methods are based on mechanical scratching, etching and removal of material via direct physical contact of the probe with the processed surface. For example, positioning the probe at specific surface locations and then applying a large force to the probe may result in irreversible indenting of the surface, which can be used to record structures. 7,8 The probe pressed against the substrate can then be scanned to produce lines. This technique is known as nanoshaving 9 , nanografting 10 or plowing lithography. 11 The probe can be resistively heated to minimize the force needed to perform these types of lithography on polymer surfaces. 12,13 Alternatively the probe in close contact with the substrate is exposed to fs-laser pulses resulting in a tip-enhanced ablation. 14 Although the scanning methods result in the desired patterning accuracy, they are not suitable for largescale production due to their serial essence, limiting the patterning throughput. The production of nanostructures by optical methods could enable the required high-speed patterning due to possible parallelization of light-based techniques. Due to the diffraction limit however, the resolution of optical methods is limited to some hundreds of nanometers for visible light. Ideally, one would like to combine the advantages of both approaches utilizing the high accuracy of scanning-probe techniques and the ease of parallelization of optical methods.* Address correspondence to andrey.lutich@physik.lmu.de, feldmann@lmu.de.. In this letter we realize this idea by introducing a novel concept of an optically driven nanoburner. The nano-burner is a metal nanoparticle, which is heated up due to strong plasmonic absorption of a focused laser beam and manipulated laterally due to optical forces exerted on it by the same laser beam. The heat released by the movable nanoparticle is used to perform thermally assisted mill...