Fabrication of a peristaltic PDMS micropump

Jeong, Ok Chan; Park, Sin Wook; Yang, Sang Sik; Pak, James Jungho

doi:10.1016/j.sna.2005.01.035

Cited by 111 publications

(57 citation statements)

References 6 publications

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“…For a pneumatic pressure of 20 kPa they were able to achieve a flow rate of 7.5 μl/min at 250 Hz. A similar three-stage, thermopneumatic, PDMS, peristaltic pump achieved 21.6 μl/min using 20 V to heat the air in a sealed actuation chamber (Jeong et al 2005). …”

Section: Peristalticmentioning

confidence: 99%

Recent advances in microscale pumping technologies: a review and evaluation

Iverson

Garimella

2008

Microfluid Nanofluid

421

249

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Micropumping has emerged as a critical research area for many electronics and biological applications. A significant driving force underlying this research has been the integration of pumping mechanisms in micro Total Analysis Systems (μTAS) and other multi-functional analysis techniques. Uses in electronics packaging and micromixing and microdosing systems have also capitalized on novel pumping concepts. The present work builds upon a number of existing reviews of micropumping strategies by focusing on the large body of micropump advances reported in the very recent literature. Critical selection criteria are included for pumps and valves to aid in determining the pumping mechanism that is most appropriate for a given application. Important limitations or incompatibilities are also addressed. Quantitative comparisons are provided in graphical and tabular forms.

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Section: Peristalticmentioning

confidence: 99%

Recent advances in microscale pumping technologies: a review and evaluation

Iverson

Garimella

2008

Microfluid Nanofluid

421

249

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“…Conventional membrane deformation measurement methods, such as a laser displacement sensor and a high-speed video camera, have been reported in previous micropump studies [15]. In this work, however, the force measurement results in Section 3.1 and the numerical calculations were combined to roughly estimate the PDMS deformation and stress distribution.…”

Section: Estimation Of Pdms Deformation and Stress Distributionmentioning

confidence: 99%

An Electromagnetically-Actuated All-PDMS Valveless Micropump for Drug Delivery

Zhou

Amirouche

2011

Micromachines

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This paper presents the fabrication process of a single-chamber planar valveless micropump driven by an external electromagnetic actuator. This micropump features a pair of micro diffuser and nozzle elements used to rectify the fluid flow, and an elastic magnetic membrane used to regulate the pressure in the enclosed fluid chamber. Polydimethylsiloxane (PDMS) is used as the main construction material of this proposed micropump, including the structural substrate and the planar actuation membrane embedded with a thin micro magnet. Both the Finite Element Method and experimental analysis are used to assess the PDMS-membrane actuation under the applied electromagnetic forces and characterize the pump performance at variable working conditions. The resonant frequency of this micropump is identified experimentally and de-ionized (DI) water is loaded to account for the coupling effects of the working fluid. The experimental data was used to demonstrate the reliability of flow rates and how it can be controlled by consistently adjusting the driving frequencies and currents. The proposed micropump is capable of delivering a maximum flow rate of 319.6 μL/min and a maximum hydrostatic backpressure of 950 Pa (9.5 cm H 2 O). The planar design feature of the pump allows for potential integration of the pump with other PDMS-based microfluidic systems for biomedical applications.

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“…Micropumps fabricated with MEMS technology have been considered for use in such fuel transport mechanisms [16][17][18][19][20][21][22][23][24][25][26][27]. Liu et al reported polyimide (PI) diaphragm micropumps (15 × 15 mm 2 ) fabricated using MEMS technology [22].…”

Section: Introductionmentioning

confidence: 99%

A Glucose Biofuel Cell Equipped in the Fluid Reservoir of a Polyimide Diaphragm Micropump

Ishida

Fukushi

Nishioka

2015

J. Photopol. Sci. Technol.

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We fabricated a micropump with a polyimide (PI) diaphragm (53 μm thick, 7 mm diameter) on a silicon chip using microfabrication processes, and a glucose biofuel cell was inserted into the fluid chamber of the micropump. The biofuel cell was fabricated on another PI film, with glucose oxidase immobilized on its porous carbon anode and bilirubin oxidase immobilized on the porous carbon cathode. Each semicircular electrode area was 14.1 mm 2 with a radius of 3 mm, and the gap between the anode and cathode was 1 mm.The device generated electricity by feeding an aqueous solution of glucose directly onto the electrodes in the micropump chamber. The maximum generated power, 0.076 μW at 98 mV, corresponding to a power density of 0.556 μW/cm 2 , was realized when a 100 mM glucose solution was introduced under diaphragm pressures alternating between 0 and 30 kPa at a pumping frequency of 3 Hz. A longer power generation lifetime was observed under fuel flow driven by micropump operation.

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Fabrication of a peristaltic PDMS micropump

Cited by 111 publications

References 6 publications

Recent advances in microscale pumping technologies: a review and evaluation

Recent advances in microscale pumping technologies: a review and evaluation

An Electromagnetically-Actuated All-PDMS Valveless Micropump for Drug Delivery

A Glucose Biofuel Cell Equipped in the Fluid Reservoir of a Polyimide Diaphragm Micropump

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