Fabrication of a microlens array featuring a high aspect ratio with a swinging diamond tool

Zhang, Xinquan; Chen, ZaoZao; Chen, JunNan; Wang, Zhendong; Zhu, Limin

doi:10.1016/j.jmapro.2022.01.005

Cited by 18 publications

(4 citation statements)

References 20 publications

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“…For example, diamond turning enables preparing microlenses with desired surface profiles on hard materials such as monocrystalline silicon and glass. 34,35 The combined technology that involves laser processing and dry/wet etching has also been developed for MLAs. 36,37 As a pioneer of this field, Chen et al have prepared various MLAs and CEs by combining laser processing-assisted wet etching with soft lithography and hot embossing.…”

Section: ■ Introductionmentioning

confidence: 99%

“…Various types of MLAs can be successfully fabricated through advanced additive and subtractive manufacturing techniques. − For example, photolithography hot melting, self-assembly, − 3D printing, , photon aggregation, , and inkjet printing , have been successfully employed for producing MLAs with different geometrical configurations and chemical compositions. For example, diamond turning enables preparing microlenses with desired surface profiles on hard materials such as monocrystalline silicon and glass. , The combined technology that involves laser processing and dry/wet etching has also been developed for MLAs. , As a pioneer of this field, Chen et al have prepared various MLAs and CEs by combining laser processing-assisted wet etching with soft lithography and hot embossing. , To promote the fabrication efficiency and guarantee the uniformity of CEs, Liu et al directly prepared templates for CEs on a curved sapphire substrate using laser processing combined with dry etching . High-quality glass CEs can be duplicated in batches via hot melt embossing.…”

Section: Introductionmentioning

confidence: 99%

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Reconfigurable Microlens Array Enables Tunable Imaging Based on Shape Memory Polymers

Sun,

Liu,

Wan

et al. 2024

ACS Appl. Mater. Interfaces

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Microlens arrays (MLAs) with a tunable imaging ability are core components of advanced micro-optical systems. Nevertheless, tunable MLAs generally suffer from high power consumption, an undeformable rigid body, large and complex systems, or limited focal length tunability. The combination of reconfigurable smart materials with MLAs may lead to distinct advantages including programmable deformation, remote manipulation, and multimodal tunability. However, unlike photopolymers that permit flexible structuring, the fabrication of tunable MLAs and compound eyes (CEs) based on transparent smart materials is still rare. In this work, we report reconfigurable MLAs that enable tunable imaging based on shape memory polymers (SMPs). The smart MLAs with closely packed 200 × 200 microlenses (40.0 μm in size) are fabricated via a combined technology that involves wet etching-assisted femtosecond laser direct writing of MLA templates on quartz, soft lithography for MLA duplication using SMPs, and the mechanical heat setting for programmable reconfiguration. By stretching or squeezing the shape memory MLAs at the transition temperature (80 °C), the size, profiles, and spatial distributions of the microlenses can be programmed. When the MLA is stretched from 0 to 120% (area ratio), the focal length is increased from 116 to 283 μm. As a proof of concept, reconfigurable MLAs and a 3D CE with a tunable field of view (FOV, 160–0°) have been demonstrated in which the thermally triggered shape memory deformation has been employed for tunable imaging. The reconfigurable MLAs and CEs with a tunable focal length and adjustable FOV may hold great promise for developing smart micro-optical systems.

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Section: ■ Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Reconfigurable Microlens Array Enables Tunable Imaging Based on Shape Memory Polymers

Sun,

Liu,

Wan

et al. 2024

ACS Appl. Mater. Interfaces

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“…On the basis of turning, ultra-precision fly cutting is developed, it is a cutting technology with constant cutting speed and more flexible cutting trajectory, which is suitable for specific micro-structures machining [42][43][44]. Nowadays, the micro-structures fabricated by UPM are more diversified, such as spherical/aspherical lens [45][46][47], multi-focal lens, Fresnel lens [48][49][50][51], polygonal mirror [52], pyramid array [53,54], micro-structure array [55], anti-reflection channel, and V-groove [56,57], etc. [58].…”

Section: Introductionmentioning

confidence: 99%

A Review of Advances in Fabrication Methods and Assistive Technologies of Micro-Structured Surfaces

Zhang

Cao

et al. 2023

Processes

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Micro-structured surfaces possess excellent properties of friction, lubrication, drag reduction, antibacterial, and self-cleaning, which have been widely applied in optical, medical, national defense, aerospace fields, etc. Therefore, it is requisite to study the fabrication methods of micro-structures to improve the accuracy and enhance the performance of micro-structures. At present, there are plenty of studies focusing on the preparation of micro-structures; therefore, systematic review of the technologies and developing trend on the fabrication of micro-structures are needed. In present review, the fabrication methods of various micro-structures are compared and summarized. Specially, the characteristics and applications of ultra-precision machining (UPM) technology in the fabrication of micro-structures are mainly discussed. Additionally, the assistive technologies applied into UPM, such as fast tool servo (FTS) technology and slow tool servo (STS) technology to fabricate micro-structures with different characteristics are summarized. Finally, the principal characteristics and applications of fly cutting technology in manufacturing special micro-structures are presented. From the review, it is found that by combining different machining methods to prepare the base layer surface first and then fabricate the sublayer surface, the advantages of different machining technologies can be greatly exerted, which is of great significance for the preparation of multi-layer and multi-scale micro-structures. Furthermore, the combination of ultra-precision fly cutting and FTS/STS possess advantages in realizing complex micro-structures with high aspect ratio and high resolution. However, residual tool marks and material recovery are still the key factors affecting the form accuracy of machined micro-structures. This review provides advances in fabrication methods and assistive technologies of micro-structured surfaces, which serves as the guidance for both fabrication and application of multi-layer and multi-scale micro-structures.

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“…Single Point Diamond Turning (SPDT) using Ultra-Precision Machining (UPM) has been the go-to processing technology for the fabrication of such optical elements, being able to meet the stringent demands required for these lenses [2]. With the rapid development in UPM research, highly complex and intricate features can now be machined with the aid of multi-axial stage positioning [3][4][5].…”

Section: Introductionmentioning

confidence: 99%

Generation of Micro Lenslet Arrays using High Efficiency Synchronized Diamond Milling

Tan¹,

Huang²,

Neo³

et al. 2022

Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022)

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Fabrication of a microlens array featuring a high aspect ratio with a swinging diamond tool

Cited by 18 publications

References 20 publications

Reconfigurable Microlens Array Enables Tunable Imaging Based on Shape Memory Polymers

Reconfigurable Microlens Array Enables Tunable Imaging Based on Shape Memory Polymers

A Review of Advances in Fabrication Methods and Assistive Technologies of Micro-Structured Surfaces

Generation of Micro Lenslet Arrays using High Efficiency Synchronized Diamond Milling

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