Fabrication of a magnetic thin-film actuator using roll-to-roll gravure printing

Abstract

Magnetic actuators are attractive for their capabilities of fast-response, large-deformation, and low-power-requirement compared to other types of actuators. The roll-to-roll printing is a continuous process with highest productivity. Here, we fabricated the cantilever-structured magnetic actuators using the roll-to-roll gravure printing process. By integrating an in-situ magnetization (ISM) process into the roll-to-roll printing process, the vector of the magnetic layer was programmed instantly during printing. This technique improved productivity and decreased materials waste. The fabrication process for the actuator includes printing the sacrificial layer, printing and magnetizing the magnetic layer, and coating the structural layer. An air gap between the substrate and cantilever beam of the actuator was made by removing the sacrificial layer. The actuator samples were examined in terms of displacement, hysteresis, and durability. Our actuators can rotate up to 90 ° and can be actuated at 20 Hz under a magnetic field of 80 mT.