Fabrication of a large computer-generated hologram with high diffraction efficiency and high accuracy by scanning homogenization etching
Hongda Wei,
Zhiyu Zhang,
Qiang Cheng
et al.
Abstract:The diffraction efficiency, defined as the ratio of diffracted power to incident power, is one of the key working indicators for a computer-generated hologram (CGH). The CGH with high diffraction efficiency could suppress stray light and eliminate ghost images, thus improving interferometric performance in aspherical testing of low-reflectivity or large off-axis distance surfaces. However, the high-efficiency CGH is hard to precisely fabricate by traditional reactive ion etching and focusing ion beam, because … Show more
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