Fabrication of a 3D Nanomagnetic Circuit with Multi-Layered Materials for Applications in Spintronics

Meng, Fanfan; Donnelly, Claire; Skorić, Luka; Hierro-Rodríguez, A.; Liao, Jung-Wei; Fernández-Pacheco, Amalio

doi:10.3390/mi12080859

Cited by 11 publications

(10 citation statements)

References 47 publications

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“…Moreover, 3D scaffolds printed by FEBID and covered by a sputtered magnetic layer have been investigated as domain-wall conduits. Such studies are directed toward the fabrication of nanodevices for 3D nanoelectronic and spintronic applications …”

Section: Introductionmentioning

confidence: 99%

“…Such studies are directed toward the fabrication of nanodevices for 3D nanoelectronic and spintronic applications. 42 In the present work, 3D core−shell nanoarchitectures are fabricated by combining the growth of 3D FEBID scaffolds and the deposition of cover layers by selective CVD. In particular, 3D PtC microbridges are printed by FEBID with the (CH 3 ) 3 CH 3 C 5 H 4 Pt precursor and selectively coated with NbC or Co 3 Fe by thermal CVD induced by Joule heating in the presence of the Nb(NMe 2 ) 3 (N-t-Bu) or the HFe-Co 3 (CO) 12 precursors, respectively.…”

Section: Introductionmentioning

confidence: 99%

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Site-Selective Chemical Vapor Deposition on Direct-Write 3D Nanoarchitectures

et al. 2023

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Recent advancements in additive manufacturing have enabled the preparation of free-shaped 3D objects with feature sizes down to and below the micrometer scale. Among the fabrication methods, focused electron beam-and focused ion beam-induced deposition (FEBID and FIBID, respectively) associate a high flexibility and unmatched accuracy in 3D writing with a wide material portfolio, thereby allowing for the growth of metallic to insulating materials. The combination of the free-shaped 3D nanowriting with established chemical vapor deposition (CVD) techniques provides attractive opportunities to synthesize complex 3D core−shell heterostructures. Hence, this hybrid approach enables the fabrication of morphologically tunable layer-based nanostructures with the great potential of unlocking further functionalities. Here, the fundamentals of such a hybrid approach are demonstrated by preparing core−shell heterostructures using 3D FEBID scaffolds for site-selective CVD. In particular, 3D microbridges are printed by FEBID with the (CH 3 ) 3 CH 3 C 5 H 4 Pt precursor and coated by thermal CVD using the Nb(NMe 2 ) 3 (N-t-Bu) and HFeCo 3 (CO) 12 precursors. Two model systems on the basis of CVD layers consisting of a superconducting NbC-based layer and a ferromagnetic Co 3 Fe layer are prepared and characterized with regard to their composition, microstructure, and magneto-transport properties.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Site-Selective Chemical Vapor Deposition on Direct-Write 3D Nanoarchitectures

et al. 2023

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“…[ 10 ] Some authors propose to circumvent the current nanofabrication limitations by metalizing a pre‐fabricated 3D scaffold using a two‐step fabrication process. [ 11,12 ]…”

Section: Introductionmentioning

confidence: 99%

“…[10] Some authors propose to circumvent the current nanofabrication limitations by metalizing a pre-fabricated 3D scaffold using a twostep fabrication process. [11,12] Scaffolding can be achieved through additive manufacturingbased strategies, which have endowed the third dimension in macroscale printing. These strategies are currently being translated to nanoscale structuring.…”

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confidence: 99%

3D Nanolithography by Means of Lipid Ink Spreading Inhibition

Berganza

Boltynjuk

Mathew

et al. 2022

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sensing, [4] regenerative medicine, [5] cell engineering [6] or cell fate control [7] represent prominent examples of the different areas that require the creation of active structural units at the nanometer scale.Despite 2D lithography of metallic nanostructures being very well-established through different techniques (in particular prominent photolithography and electron beam lithography), the creation of micro/ nanoscale 3D metallic structures with arbitrary shapes still constitutes a challenge. In this regard, electron and ion beam technologies have proven to be able to write 3D structures with high resolution. [8] A recent publication reports the creation of a Co double helix structure using focus electron beam-induced deposition, [9] although these techniques are not fully established and require the use of expensive equipment. Following a different approach, based on scanning probe lithography (SPL), Hengsteler and coauthors were able to electroplate sub-100 nm diameter copper pillars with the FluidFM technology and created other complex 3D arbitrary shapes. [10] Some authors propose to circumvent the current nanofabrication limitations by metalizing a pre-fabricated 3D scaffold using a twostep fabrication process. [11,12] Scaffolding can be achieved through additive manufacturingbased strategies, which have endowed the third dimension in macroscale printing. These strategies are currently being translated to nanoscale structuring. While direct laser writing techniques, such as two-photon lithography [13] are powerful candidates to create polymeric scaffolds, [12] SPL techniques are currently been developed to print 3D structures. SPL techniques provide a good alternative to the above-mentioned technologies, as they do not require very expensive facilities or clean rooms to obtain high pattern resolution. It has recently been demonstrated that using the FluidFM technology, a monomer ink can be patterned in a layer-by-layer writing process with intermediate curing steps which can dispense a UV curable polymer [14,15] or a customized polymer to achieve rapid surfaceinitiated crosslinking through versatile macro-crosslinkers. [16] Alternatively, 3D dip-pen nanolithography (DPN) printing was recently achieved by careful design of a polymer endowing it with a humidity-dependent behavior and adequate rheological properties. [17] While the design of printing inks has been extensively explored, much less effort has been devoted to the design and chemical functionalization of substrates to achieve different effects, such as hampering the ink spreading, due to tailored surface energies, [18] although some authors already stated While patterning 2D metallic nanostructures are well established through different techniques, 3D printing still constitutes a major bottleneck on the way to device miniaturization. In this work a fluid phase phospholipid ink is used as a building block for structuring with dip-pen nanolithography. Following a bioinspired approach that relies on ink-spreading inhibition, two processes are pre...

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“…This development has been focused on the optimization of thin magnetic patterns in 2D. More recently, the investigation has been extended to 3D FEBID magnetic deposits [33][34][35], spurred on by promising applications in scanning probe techniques, such as Magnetic Force Microscopy (MFM) [36] and Magnetic Resonance Force Microscopy (MRFM) [37], racetrack-type magnetic memories [14], Hall sensors [11,22], nanomagnetic logic circuits [36,38], superconducting vortex lattice pinning [39], remote magneto-mechanical actuation [40], etc. However, whereas FEBID flexibility allows the production of challenging structures with sophisticated geometries [7,10,12], many applications can be based on the simplest objects, such as vertical straight nanowires.…”

Section: Introduction To Febid and Mfmmentioning

confidence: 99%

Magnetic Functionalization of Scanning Probes by Focused Electron Beam Induced Deposition Technology

2021

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The fabrication of nanostructures with high resolution and precise control of the deposition site makes Focused Electron Beam Induced Deposition (FEBID) a unique nanolithography process. In the case of magnetic materials, apart from the FEBID potential in standard substrates for multiple applications in data storage and logic, the use of this technology for the growth of nanomagnets on different types of scanning probes opens new paths in magnetic sensing, becoming a benchmark for magnetic functionalization. This work reviews the recent advances in the integration of FEBID magnetic nanostructures onto cantilevers to produce advanced magnetic sensing devices with unprecedented performance.

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Fabrication of a 3D Nanomagnetic Circuit with Multi-Layered Materials for Applications in Spintronics

Cited by 11 publications

References 47 publications

Site-Selective Chemical Vapor Deposition on Direct-Write 3D Nanoarchitectures

Site-Selective Chemical Vapor Deposition on Direct-Write 3D Nanoarchitectures

3D Nanolithography by Means of Lipid Ink Spreading Inhibition

Magnetic Functionalization of Scanning Probes by Focused Electron Beam Induced Deposition Technology

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