Fabrication of 3D Quantum Dot Array by Fusion of Bio-Template and Neutral Beam Etching I: Basic Technologies

Samukawa, Seiji

doi:10.1007/978-4-431-56429-4_9

Intelligent Nanosystems for Energy, Information and Biological Technologies 2016

DOI: 10.1007/978-4-431-56429-4_9

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Fabrication of 3D Quantum Dot Array by Fusion of Bio-Template and Neutral Beam Etching I: Basic Technologies

Seiji Samukawa

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Fabrication of 3D Quantum Dot Array by Fusion of Bio-Template and Neutral Beam Etching I: Basic Technologies

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References 42 publications

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