Fabrication and testing of high quality small germanium plano-convex lens

Chang, Rong Seng; Chern, Ter Chin; Lin, Chern‐Sheng; Lay, Yun Long

doi:10.1016/0143-8166(94)90047-7

Cited by 6 publications

(2 citation statements)

References 6 publications

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“…Single-crystal germanium is an important infrared optical material, which has very high permeability and high refractive index in the wavelength range of 2-14 µm. Thus, it is an excellent substrate material for infrared lenses with extensive applications in thermal imaging systems, darkfield optical instruments, astronomical telescopes and so on [1,2]. Recently, the demands for complex-shaped infrared optical elements such as aspherical lenses, Fresnel lenses and diffraction grating lenses [3,4] are increasing remarkably.…”

Section: Introductionmentioning

confidence: 99%

Micro grooving on single-crystal germanium for infrared Fresnel lenses

Yan

Maekawa

Tamaki

et al. 2005

J. Micromech. Microeng.

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Single-crystal germanium is an excellent optical material in the infrared wavelength range. The development of germanium Fresnel lenses not only improves the optical imaging quality but also enables the miniaturization of optical systems. In the present work, we developed a ductile-mode micro grooving process for fabricating Fresnel lenses on germanium. We used a sharply pointed diamond tool to generate the micro Fresnel structures under three-axis ultraprecision numerical control. By adopting a small angle between the cutting edge and the tangent of the objective surface, this method enables the uniform thinning of the undeformed chip thickness to the nanometric range, and thus provides complete ductile regime machining of brittle materials. Under the present conditions, a Fresnel lens which has a form error of 0.5 µm and surface roughness of 20–50 nm Ry (peak-to-valley) was fabricated successfully during a single tool pass.

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Section: Introductionmentioning

confidence: 99%

Micro grooving on single-crystal germanium for infrared Fresnel lenses

Yan

Maekawa

Tamaki

et al. 2005

J. Micromech. Microeng.

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show abstract

“…Single-crystalline germanium is an important infrared optical material which has a small band gap, allowing it to efficiently respond to infrared lights. Its unique properties such as high permeability and high refractive index lead to a large variety of applications in infrared spectroscopes and other optical equipment which requires extremely sensitive infrared detectors [1][2][3][4]. Optical elements, such as aspherical lenses and Fresnel lenses, allow freedom of design, offer excellent aberration correction performance and provide superior resolution performance.…”

Section: Introductionmentioning

confidence: 99%

Improving the Profile Integrity of Germanium Fresnel Lenses in Micro Grooving Processes

Yan

Fan

Kuriyagawa

et al. 2007

LEM21

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Ductile mode micro grooving with a sharply-pointed diamond tool under three-axis numerical control can fabricate precise micro Fresnel structures on single crystal germanium. However, in a practical durable machining process, the tool tip will wear gradually and finally produce micro chippings at the edges of the micro prisms. In the present paper, a new tool path is proposed in order to prevent the occurrence of micro chippings. The micro fractures occurred in machining can be completely removed during the following cut, thus leave the micro prisms damage free. Experimental results have demonstrated that the proposed method can significantly improve the profile integrity of a Fresnel lens and enable longer effective tool life.

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Nano and Micromachining

Davim¹,

Jackson²

2009

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Fabrication and testing of high quality small germanium plano-convex lens

Cited by 6 publications

References 6 publications

Micro grooving on single-crystal germanium for infrared Fresnel lenses

Micro grooving on single-crystal germanium for infrared Fresnel lenses

Improving the Profile Integrity of Germanium Fresnel Lenses in Micro Grooving Processes

Nano and Micromachining

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