Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation 2008
DOI: 10.1117/12.787699
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Fabrication and testing of diamond-machined gratings in ZnSe, GaP, and bismuth germanate for the near-infrared and visible

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Cited by 11 publications
(7 citation statements)
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“…The remaining problem is chipping and pitting of the grooves, which can lead to ghosts in the spectrum 10 . We believe that this effect is caused by subsurface damage in the grating substrate produced by polishing or prior diamond machining.…”
Section: Discussionmentioning
confidence: 99%
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“…The remaining problem is chipping and pitting of the grooves, which can lead to ghosts in the spectrum 10 . We believe that this effect is caused by subsurface damage in the grating substrate produced by polishing or prior diamond machining.…”
Section: Discussionmentioning
confidence: 99%
“…It was a big puzzle why a coarse grating cut on a one inch ZnSe disc in October 2007 had very good (0.30 wave p-v) wavefront error 10 and the large ZnSe grating cut 10 months later on the same machine had several waves of aberration. Experiments with a capacitive distance transducer mounted on the translation stage showed its position relative to the spindle drifted nearly 2 µm over 24 hours, greatly exceeding the design specification of the machine.…”
Section: Cutting the Gratingmentioning
confidence: 99%
“…However, the immersion grating technology for the NIR wavelengths had not been established for a long time, except for silicon immersion grating fabricated by the photolithographic technique, 13,14 because it was difficult to cut brittle materials, polycrystal CVD-ZnSe or CVD-ZnS * , without any chipping on the groove edge. Recently, we succeeded to produce fine grooves on the ZnSe substrate with a small pitch (∼ 30 µm) by nano precision fly-cutting technique at the Lawrence Livermore National Laboratory, 1 and we concluded that it achieves the good surface irregularity (< λ/8), the small surface roughness (< 5 nm), and the small random pitch error (< 3 nm).…”
Section: Introductionmentioning
confidence: 94%
“…w × tanθ indicates the effective beam diameter illuminating grooves and the resolving power is proportional to the input beam diameter. Although the immersion grating concept has been around for some time [22,23] for silicon [24][25][26], ZnSe [27], GaP [27], and bismuth germinate [27], recent advances in machining techniques of brittle crystals like CdZnTe [28], InP [29], and germanium have enabled their realization [29][30][31] and potential application for spectroscopy in the infrared. In the field of infrared astronomy, immersion gratings are highly desired for their high resolving power, which for a normal echelle grating would have been of much larger sizes.…”
Section: B Immersion Gratingmentioning
confidence: 99%