2006
DOI: 10.1016/j.ijms.2005.12.013
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Fabrication and testing of a miniature cylindrical ion trap mass spectrometer constructed from low temperature co-fired ceramics

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Cited by 68 publications
(56 citation statements)
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“…Among them, Cooks at Purdue University has successfully integrated 106 miniaturized cylindrical ion traps with an inner diameter of 1 µm into a chip using the technologies of tungsten inlay and chemical vapourdeposition. 11,12 Most researches on MEMS ion traps are based on linear and cylindrical ion traps 13,14 and only a few are based on the rectilinear ion traps, which have larger ion capacity. In addition, in the a Electronic mail: tangf@mail.tsinghua.edu.cn.…”
Section: -4mentioning
confidence: 99%
“…Among them, Cooks at Purdue University has successfully integrated 106 miniaturized cylindrical ion traps with an inner diameter of 1 µm into a chip using the technologies of tungsten inlay and chemical vapourdeposition. 11,12 Most researches on MEMS ion traps are based on linear and cylindrical ion traps 13,14 and only a few are based on the rectilinear ion traps, which have larger ion capacity. In addition, in the a Electronic mail: tangf@mail.tsinghua.edu.cn.…”
Section: -4mentioning
confidence: 99%
“…In another study, the ring electrodes (r 0 ¼ 1.375 mm) of CITs were fabricated from low temperature co-fired ceramics (LTCC), and areas to be metallized were patterned photolithographically, which enabled easy batch fabrication (Chaudhary et al, 2006). The endplates were made of stainless steel.…”
Section: A Ion Trapsmentioning
confidence: 99%
“…11 The reasons for the choice of the ion trap as the mass analyzer in our program as well as at Brigham Young University, Oak Ridge National Laboratory, the University of North Carolina, the University of South Florida, and the Defence Evaluation and Research Agency (U.K.) are summarized in Table 2. 5,7,10,12 Two contrasting approaches to building small, capable mass spectrometer systems can be taken. In the "bottom-up" approach, the scale of interest is chosen, and components are built and assembled on that scale.…”
Section: Ion-trap-based Miniature Instrumentsmentioning
confidence: 99%