2009
DOI: 10.1117/12.828513
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Fabrication and testing of 1.4-m convex off-axis aspheric optical surfaces

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Cited by 21 publications
(23 citation statements)
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“…Due to the limitation of sensor and software only profile measurement was available and the accuracy was achieved to approximately 50nm RMS. 6 …”
Section: Swingarm Profilometer: 1997mentioning
confidence: 99%
“…Due to the limitation of sensor and software only profile measurement was available and the accuracy was achieved to approximately 50nm RMS. 6 …”
Section: Swingarm Profilometer: 1997mentioning
confidence: 99%
“…With the ability of providing high image quality with few optical components, aspherical optics are widely used in modern optical systems, such as space telescopes, laser fusion systems, and lithography systems. In general, the specifications for the surface accuracy made on these aspherical components need to achieve nanometer-scale or even subnanometer-scale precision [4][5][6]. However, aspherical optics takes on a more complex shape compared with spherical optics, and conventional tools therefore cannot readily conform to the local varying curvatures [4,7,8].…”
Section: Introductionmentioning
confidence: 99%
“…In general, the specifications for the surface accuracy made on these aspherical components need to achieve nanometer-scale or even subnanometer-scale precision [4][5][6]. However, aspherical optics takes on a more complex shape compared with spherical optics, and conventional tools therefore cannot readily conform to the local varying curvatures [4,7,8]. Usually, small rigid tools and the manual method are typically employed to polish aspherical surfaces, but middle-to-high spatial frequency (MHSF) ripples and high-slope surface errors are often generated during these processes [6].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, computer controlled optical surfacing (CCOS) processes have been developed for fabrication of precision optics since the 1960s [1][2][3][4][5]. These processes have radically different polishing mechanisms, including computer controlled polishing [6], ion beam figuring (IBF) [7], plasma-assisted chemical etching [8], magnetorheological finishing [9], magnetorheological jet polishing [10,11].…”
Section: Introductionmentioning
confidence: 99%
“…These processes have radically different polishing mechanisms, including computer controlled polishing [6], ion beam figuring (IBF) [7], plasma-assisted chemical etching [8], magnetorheological finishing [9], magnetorheological jet polishing [10,11]. Many large aspheric even off-axis segments have been successfully fabricated using them [4,5].…”
Section: Introductionmentioning
confidence: 99%