Fabrication and Soft-X-Ray and EUV Range Testing of Au- and Multilayer Mo/Si-Coated Diffraction Gratings with High-Order Blaze

Goray, L. I.; Berezovskaya, T. N.; Mokhov, D. V.; Sharov, V. A.; Shubina, K. Yu.; Pirogov, E. V.; Dashkov, A. S.; Nashchekin, A. V.; Zorina, M. V.; Barysheva, M. M.; Garakhin, S. A.; Zuev, S. Yu.; Chkhalo, N. I.

doi:10.3103/s1068335623140063

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Fabrication and Soft-X-Ray and EUV Range Testing of Au- and Multilayer Mo/Si-Coated Diffraction Gratings with High-Order Blaze

Cited by 2 publications

References 28 publications

X-ray echelles: account of groove profile deformations for diffraction eﬃciency in electromagnetic calculus

X-ray echelles: account of groove profile deformations for diffraction eﬃciency in electromagnetic calculus

Blazed Silicon Gratings for Soft X-Ray and Extreme Ultraviolet Radiation: the Effect of Groove Profile Shape and Random Roughness on the Diffraction Efficiency

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