2011
DOI: 10.1016/j.nima.2010.06.330
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Fabrication and performance test of a silicon photo-strip detector coupled with a crystal scintillator

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Cited by 17 publications
(4 citation statements)
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“…The light entrance window on the ohmic side comprises an n þ ion implanted layer and an anti-reflective coating (ARC) surface. The layers are optimized to provide a sufficient depletion depth and to acquire all of the incident light [11]. An n-channel stop structure [12] is employed as a field shaper to suppress the leakage current from the edge.…”
Section: Design and Fabricationmentioning
confidence: 99%
“…The light entrance window on the ohmic side comprises an n þ ion implanted layer and an anti-reflective coating (ARC) surface. The layers are optimized to provide a sufficient depletion depth and to acquire all of the incident light [11]. An n-channel stop structure [12] is employed as a field shaper to suppress the leakage current from the edge.…”
Section: Design and Fabricationmentioning
confidence: 99%
“…The dimensions of each PD are 23 × 23 × 0.65 mm 3 . The PD has an active area of 20 × 20 mm 2 and a light entrance window, and was designed and fabricated using standard photolithography techniques [22]. The leakage current was measured with a Keithley 6517A picoammeter, and the capacitance was measured with a HP4277A LCZ meter.…”
Section: Jinst 10 P07018mentioning
confidence: 99%
“…The detector configuration makes possible to provide not only position of incoming light, but also depth of interaction in crystal scintillator. The DOl is given by measuring signal to noise ration between the first and second photo-strip sensors [1]. We measure the energy resolution of fabricated 1 cm Table 1.…”
Section: Introductionmentioning
confidence: 99%
“…The ARC surface is made of stacked dielectric layers with appropriate thickness [2]. The ARC and n + layers are optimized to be 70 nm and 250 nm to provide sufficient depletion depth and acquire the entire incident light [1]. The prototype sensors on the wafer are shown in Fig.…”
Section: Introductionmentioning
confidence: 99%