2003
DOI: 10.1143/jjap.42.5217
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Fabrication and Optical Property of GaSe Thin Films Grown by Pulsed Laser Deposition

Abstract: The highly oriented (001) GaSe film on c-cut sapphire (0001) was successfully fabricated by pulsed laser deposition. As growth temperature decreases from 550 C to 375 C, the structure of films changes from cubic zinc-blende Ga 2 Se 3 phase to GaSe phase. The growth temperature of the critical transition from Ga 2 Se 3 phase to GaSe phase is around 500 C. From atomic force microscope (AFM) results, it is observed that the growth process of GaSe film is in the manner of layer plus island growth. Besides, the opt… Show more

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Cited by 7 publications
(3 citation statements)
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References 12 publications
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“…Therefore, it is difficult to achieve high‐quality hetero‐epitaxy of GaSe. Various methods have been reported for growing GaSe thin films, including metal oxide chemical vapor deposition , vapor deposition , pulsed laser deposition , and molecular beam epitaxy (MBE) . The effect of different substrate is crucial for high‐quality GaSe epitaxial growth.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, it is difficult to achieve high‐quality hetero‐epitaxy of GaSe. Various methods have been reported for growing GaSe thin films, including metal oxide chemical vapor deposition , vapor deposition , pulsed laser deposition , and molecular beam epitaxy (MBE) . The effect of different substrate is crucial for high‐quality GaSe epitaxial growth.…”
Section: Introductionmentioning
confidence: 99%
“…Due to technological progress, there is a requirement for new materials and thus the synthesis of such materials is an active area of research. In the development of materials based on gallium selenides, several research groups use pulsed laser deposition (PLD) for the generation of the new materials such as GaSe thin films and two‐dimensional Ga‐Se nanosheet networks . Laser chemical vapour deposition (LCVD) is used for the deposition of layers from the gas phase .…”
Section: Introductionmentioning
confidence: 99%
“…In the development of materials based on gallium selenides, several research groups use pulsed laser deposition (PLD) for the generation of the new materials such as GaSe thin films and two-dimensional Ga-Se nanosheet networks. 28,29 Laser chemical vapour deposition (LCVD) is used for the deposition of layers from the gas phase. 30 Laser pulses are also used to produce nanocompounds such as quantum dots in liquid solutions.…”
Section: Introductionmentioning
confidence: 99%