Fabrication and operation of triode electron emitters as ion source for miniature mass spectrometer

Cho, Jung Bin; Yoon, H.J.; Yang, Sang Sik; Koh, Ken Ha; Lee, Soonil

doi:10.1109/ivnc.2007.4480907

2007 IEEE 20th International Vacuum Nanoelectronics Conference 2007

DOI: 10.1109/ivnc.2007.4480907

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Fabrication and operation of triode electron emitters as ion source for miniature mass spectrometer

Jung Bin Cho

H.J. Yoon

Sang Sik Yang

et al.

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Fabrication and operation of triode electron emitters as ion source for miniature mass spectrometer

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