Fabrication and Nonlinear Thermomechanical Analysis of SU8 Thermal Actuator

Viannie, Leema Rose; Jayanth, G. R.; Radhakrishna, V.; Rajanna, K.

doi:10.1109/jmems.2015.2490485

Cited by 13 publications

(3 citation statements)

References 33 publications

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“…Flexible electronics are a burgeoning category of electronics, and usually consist of a thin compliant polymer, metal stretchable circuits and/or inorganic functional components. With their peculiar properties of flexibility and stretchability, much attention has been focused on flexible electronics in the field of biomedical instruments [1][2][3], wearable health monitoring [4,5], flexible sensors [6][7][8][9], flexible actuators [10][11][12] and so on.…”

Section: Introductionmentioning

confidence: 99%

A widely adaptable analytical method for thermal analysis of flexible electronics with complex heat source structures

Yin

Yuan

et al. 2019

Proc. R. Soc. A.

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Flexible electronics, as a relatively new category of device, exhibit prodigious potential in many applications, especially in bio-integrated fields. It is critical to understand that thermal management of certain kinds of exothermic flexible electronics is a crucial issue, whether to avoid or to take advantage of the excessive temperature. A widely adaptable analytical method, validated by finite-element analysis and experiments, is conducted to investigate the thermal properties of exothermic flexible electronics with a heat source in complex shape or complex array layout. The main theoretical strategy to obtain the thermal field is through an integral along the complex curve source region. The results predicted by the analytical model enable accurate control of temperature and heat flow in the flexible electronics, which may help in the design and fabrication of flexible electronic devices in the future.

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Section: Introductionmentioning

confidence: 99%

A widely adaptable analytical method for thermal analysis of flexible electronics with complex heat source structures

Yin

Yuan

et al. 2019

Proc. R. Soc. A.

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show abstract

“…Initially introduced in the microfabrication process as a photoresist capable of patterning high aspect ratio structures, SU-8 has been used as well as a structural material, due to the relatively good mechanical and optical properties of the hardened polymer. As a result, SU-8 photoresist has been very popular for fabrication of both fixed and movable structures in the field of optics, fluidics and MEMS actuators [1][2][3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

“…However, the complexity of the microfabrication process was kept high, to maintain the standard depositionpatterning-etching cycle characteristics for micromachining technology. Silicon can be used, for instance, as both substrate and sacrificial layer, released through back etching [6,10]. Silicon dioxide has also been reported as an option, with an additional deposition-patterning-etching step added, in order to prevent the over-etching under the SU-8 layer [5].…”

Section: Introductionmentioning

confidence: 99%

MEMS transducers low-cost fabrication using SU-8 in a sacrificial layer-free process

Cretu

2017

J. Micromech. Microeng.

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We report novel low-cost and rapid fabrication technologies for the fabrication of movable polymer-based MEMS structures, electrically actuated. Using SU-8 photoresist as structural material, both ordinary and functionalized by conductive fillers (nano-Ag particles and carbon nanotubes), the novel fabrication methods provide simple processes, without the use of any sacrificial layer, for achieving suspended structures (beams and membranes) through either binary or gray-scale photolithography. Experimental validation has demonstrated high yields (over 99% for one of the process flows) in achieving electrostatically actuated microstructures with resonant frequencies in the 0.5–0.8 MHz range, with a stable dynamic behavior tested for a period longer than three months. The technology also confirms that ‘doping’ SU-8 with conductive fillers can preserve its photo-patterning capabilities, while modifying other physical properties (electrical conductivity). As the patterning of SU-8 films can take place on either rigid or flexible substrates, this low-cost technology promises a wide range of applications.

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Design and characterization of a polymer electrothermal microgripper with a polynomial flexure for efficient operation and studies of moisture effect on negative deflection

et al. 2020

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Fabrication and Nonlinear Thermomechanical Analysis of SU8 Thermal Actuator

Cited by 13 publications

References 33 publications

A widely adaptable analytical method for thermal analysis of flexible electronics with complex heat source structures

A widely adaptable analytical method for thermal analysis of flexible electronics with complex heat source structures

MEMS transducers low-cost fabrication using SU-8 in a sacrificial layer-free process

Design and characterization of a polymer electrothermal microgripper with a polynomial flexure for efficient operation and studies of moisture effect on negative deflection

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