Fabrication and investigation of 1D and 2D structures in LiNbO3 thin films by pulsed laser ablation

Meriche, Faiza; Boudrioua, Azzedine; Kremer, R.; Dogheche, El Hadj; Neiss-Clauss, E.; Mouras, Rabah; Fischer, A.; Beghoul, M.R.; Fogarassy, É.; Boutaoui, N.

doi:10.1016/j.optmat.2010.05.010

Cited by 23 publications

(8 citation statements)

References 40 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Optical waveguides comprised of hetero-materials efficiently confine propagating light because of large difference in refractive indices between the film and the substrate [13]. Therefore, LiNbO3s have been grown by several techniques including liquid-phase epitaxy [14], Ion Beam Sputtering [15], RF magnetron sputtering [16], molecular beam epitaxy [17], metalorganic chemical vapor deposition [18], pulsed-laser deposition (PLD) [19], thermal plasma spray chemical vapor deposition [20], electron-cyclotron-resonance (ECR) plasma sputtering [21], electron beam irradiation [22] and pulsed laser ablation (PLA) [23].…”

Section: Introductionmentioning

confidence: 99%

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

et al. 2017

View full text Add to dashboard Cite

Abstract. This paper focuses on the structure and optical properties of Lithium niobate (LN) deposited on quartz substrate by sol-gel method. The solution was prepared at different molarity concentration and annealed at 500 o C. The LNs were analyzed by UV-visible, X-ray diffraction (XRD) and Scanning Electron Microscope (SEM). The results show that as the molar concentration increases, the films crystallization becomes more atomically distributed and the energy band gap approaches 4 eV. Transmission spectra were taken in the wavelength range of 400-1100 nm. Hexagonal structure was observed with good atoms distribution and homogeneous crystallization. There were two phases of LNs recorded in this work.

show abstract

Section: Introductionmentioning

confidence: 99%

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

et al. 2017

View full text Add to dashboard Cite

show abstract

“…In the case of LN and LT films and crystals, Raman scattering is used as a nondestructive, local, and fast probe for strain, Li nonstoichiometry and LiNbO 3 phase purity . Additional Raman modes to the LN Raman signature have been observed in thin film spectra and they were interpreted as defect modes, mainly related to the Li deficiency . Later, the frequencies of Raman modes of LiNb 3 O 8 and Li 3 NbO 4 were identified, and these modes were attributed to the LiNb 3 O 8 phase .…”

Section: Growth Of Linbo3 and Litao3 Films By Chemical And Physical Mmentioning

confidence: 99%

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications

Bartasyte

Margueron

Baron

et al. 2017

Adv Materials Inter

View full text Add to dashboard Cite

In 1928, Zachariasen discovered the LiNbO 3 phase. [1] The first single crystals were grown using the flux method by Matthias Over the past five decades, LiNbO 3 and LiTaO 3 single crystals and thin films have been studied intensively for their exceptional acoustic, electro-optical, and pyroelectric and ferroelectric properties. Today, LiNbO 3 single crystals in electro-optics are equivalent to silicon in electronics, and about 70% of radio-frequency (RF) filters, based on surface acoustic waves, are fabricated on these single crystals. These materials in the form of thin films are needed urgently for the development of the next-generation of high-frequency and/or wide-band RF filters or tuneable frequency filters adapted to the fifth generation of infrastructures/networks/communications. The integration of LiNbO 3 films in guided nanophotonic devices will allow higher operational frequencies, wider bandwidth, and miniaturized optical devices in line with improved electronic conversion. Here, the challenges and the achievements in the epitaxial growth of LiTaO 3 and LiNbO 3 thin films and their integration with silicon technology and to acoustic and guided nanophotonic devices are discussed in detail. The systematic representation and classification of all epitaxial relationships reported in the literature have been carried out in order to help the prediction of the epitaxial orientations in the new heterostructures. Future prospects of potential applications and the expected performances of thin film devices are overviewed, as well.Figure 2. Schematic representation of the layer transfer process by the ion slicing technique consisting of a) ion implantation, b) wafer bonding, c) laser irradiation or heating in order to obtain d) a single crystalline layer on the host (Si) substrate. Reproduced with permission. [53]Figure 3. a,b) Electron microscopy images and c) schematic diagram of a microresonator based on LiNbO 3 film on Si and fabricated by the layer transfer technique. Reproduced with permission. [53]The first reports on the growth of c-axis-oriented LN films by liquid phase epitaxy on an LT substrate and by RF sputtering Adv. Mater. Interfaces 2017, 4, 1600998 www.advmatinterfaces.de www.advancedsciencenews.com Figure 6. Frequency response of a) HBAR and b) FBAR based on thinned X-cut LiNbO 3 layer on Si. Schematic representations of a) HBAR and b) FBAR structures are given in the insets. Reproduced with permission. [78]

show abstract

“…Direct laser treatment of ion-doped lithium niobate can induce gratings and channel optical waveguides within the surface layers [ 10 ]. Alternatively thin films of LiNbO 3 deposited on sapphire can be ablated by an excimer laser to create smooth ablated structures, with little damage to adjacent areas [ 11 ]. Recently rare-earth-ion-doped lithium niobate waveguides have been fabricated for on-chip integrated structures [ 12 , 13 ].…”

Section: Introductionmentioning

confidence: 99%

Channel Waveguides in Lithium Niobate and Lithium Tantalate

Johnston

Dekker

et al. 2020

Molecules

View full text Add to dashboard Cite

Low-loss photonic waveguides in lithium niobate offer versatile functionality as nonlinear frequency converters, switches, and modulators for integrated optics. Combining the flexibility of laser processing with liquid phase epitaxy we have fabricated and characterized lithium niobate channel waveguides on lithium niobate and lithium tantalate. We used liquid phase epitaxy with K2O flux on laser-machined lithium niobate and lithium tantalate substrates. The laser-driven rapid-prototyping technique can be programmed to give machined features of various sizes, and liquid phase epitaxy produces high quality single-crystal, lithium niobate channels. The surface roughness of the lithium niobate channels on a lithium tantalate substrate was measured to be 90 nm. The lithium niobate channel waveguides exhibit propagation losses of 0.26 ± 0.04 dB/mm at a wavelength of 633 nm. Second harmonic generation at 980 nm was demonstrated using the channel waveguides, indicating that these waveguides retain their nonlinear optical properties.

show abstract

Fabrication and investigation of 1D and 2D structures in LiNbO3 thin films by pulsed laser ablation

Cited by 23 publications

References 40 publications

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications

Channel Waveguides in Lithium Niobate and Lithium Tantalate

Contact Info

Product

Resources

About

Fabrication and investigation of 1D and 2D structures in LiNbO3 thin films by pulsed laser ablation

Cited by 23 publications

References 40 publications

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

Toward High‐Quality Epitaxial LiNbO3 and LiTaO3 Thin Films for Acoustic and Optical Applications

Channel Waveguides in Lithium Niobate and Lithium Tantalate

Contact Info

Product

Resources

About

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications