2003
DOI: 10.1088/0964-1726/12/1/313
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Fabrication and high durability of functionally graded piezoelectric bending actuators

Abstract: A new type of functionally graded (FG) piezoelectric bending actuator was proposed by the present authors in their former study and the advantage of the new actuator over the traditional bimorph and unimorph actuators in internal stress distribution was illustrated by simulation results. In this study, the fabrication process of FG piezoelectric bending actuators is developed and the characteristics of the fabricated actuators are investigated. The material compositions with different dielectric and piezoelect… Show more

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Cited by 83 publications
(38 citation statements)
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“…Since these actuators are manufactured by bonding one or two piezoelectric layers to a metal shim layer, the bonding interface has low strength. On the other hand, large stress discontinuity and concentration are initiated in the bonding interface due to the difference of material properties between the shim and piezoelectric layer [2]. To solve this problem, a novel class of actuators were developed in 1995 in which one or more layers were made from FGPMs with thermo-electromechanical properties varying smoothly along the layer thickness [3].…”
Section: Introductionmentioning
confidence: 99%
“…Since these actuators are manufactured by bonding one or two piezoelectric layers to a metal shim layer, the bonding interface has low strength. On the other hand, large stress discontinuity and concentration are initiated in the bonding interface due to the difference of material properties between the shim and piezoelectric layer [2]. To solve this problem, a novel class of actuators were developed in 1995 in which one or more layers were made from FGPMs with thermo-electromechanical properties varying smoothly along the layer thickness [3].…”
Section: Introductionmentioning
confidence: 99%
“…Recently, functionally graded actuator systems have attracted much attention [14][15][16]. In this paper, fabrication of graded electromechanical actuators from Nd and Zr doped BT was explored.…”
Section: Introductionmentioning
confidence: 99%
“…These actuators are manufactured by bonding one or two piezoelectric layers to a metal shim layer, where the stress concentration and structural weakness at the bonding interface primarily cause the breakdown of the unimorph and bimorph actuators in cyclic actuation [8]. Qiu et al [9][10][11] proposed a new type of functionally graded (FG) piezoelectric actuator.…”
Section: Introductionmentioning
confidence: 99%
“…Due to the gradation of material properties, the layers will generate a graded distribution of in-plane strain when they are considered separately. Since all the layers are integrated in a single element, a bending deformation is generated with relatively small internal stress [11].…”
Section: Introductionmentioning
confidence: 99%