2019
DOI: 10.3390/membranes9100123
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Fabrication and Evaluation of Trimethylmethoxysilane (TMMOS)-Derived Membranes for Gas Separation

Abstract: Gas separation membranes were fabricated with varying trimethylmethoxysilane (TMMOS)/tetraethoxy orthosilicate (TEOS) ratios by a chemical vapor deposition (CVD) method at 650 °C and atmospheric pressure. The membrane had a high H2 permeance of 8.3 × 10−7 mol m−2 s−1 Pa−1 with H2/CH4 selectivity of 140 and H2/C2H6 selectivity of 180 at 300 °C. Fourier transform infrared (FTIR) measurements indicated existence of methyl groups at high preparation temperature (650 °C), which led to a higher hydrothermal stabilit… Show more

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Cited by 8 publications
(16 citation statements)
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“…(2) ν*, the vibrational frequency should be higher for the permeate gas having the smaller molecular weight, i.e., ν* for H2 (2.02 g mol −1 ) > ν* for He (4.00 g mol −1 ). As shown in Table 2, the values of NS and ν* estimated for He and H2 permeations through the PCS(UH) corresponded to the physical constants mentioned above, and similar to those previously reported for the membranes composed of SiOC (#01) [45] or SiO2 (#02 ~ 05) [41,42,46,47].…”
Section: Analysis Of Gas Permeation Behaviors (1) He and H2 Permeationssupporting
confidence: 87%
See 1 more Smart Citation
“…(2) ν*, the vibrational frequency should be higher for the permeate gas having the smaller molecular weight, i.e., ν* for H2 (2.02 g mol −1 ) > ν* for He (4.00 g mol −1 ). As shown in Table 2, the values of NS and ν* estimated for He and H2 permeations through the PCS(UH) corresponded to the physical constants mentioned above, and similar to those previously reported for the membranes composed of SiOC (#01) [45] or SiO2 (#02 ~ 05) [41,42,46,47].…”
Section: Analysis Of Gas Permeation Behaviors (1) He and H2 Permeationssupporting
confidence: 87%
“…The fitting parameters obtained in this study were listed in Table 2, and compared with those for H2-selective amorphous ceramic membranes previously reported by other research groups: polysiloxanederived amorphous silicon oxycarbide (SiOC) membrane (#01) synthesized by pyrolysis at 700 • C in Ar [45], and CVD-derived SiO2 membranes (#02 ~ 05) having different microporosity which Oyama et al [41,42,46,47] systematically synthesized by varying the organic ligand of starting Si alkoxide precursor and CVD process temperature in Ar: #02 [46] and #03 [41] (tetraethoxysilane (TEOS) at 600 • C), #04 (vinyltriethoxysilane (VTES) at 600 • C) [42], #05 (35% trimethylmethoxysilane (TMMOS) -TEOS at 650 • C) [47].…”
Section: Analysis Of Gas Permeation Behaviors (1) He and H2 Permeationsmentioning
confidence: 75%
“…Thus, the observed E a values for He and H 2 permeations could depend on the density of the AHPCS-derived SiCH organic–inorganic hybrid network. However, a unique point was that, regardless of the synthesis temperature, the E a for H 2 permeation was found to be smaller than that for He permeation, which was a clear contrast to those evaluated for the H 2 -selecitve microporous amorphous silica membranes [ 10 , 11 , 65 , 66 , 67 ]. Then, an attempt was made for study on the hydrogen affinity of the AHPCS-derived SiCH organic–inorganic hybrid: The amount of H 2 adsorption on the AHPCS-derived SiCH film was measured by using a quartz-crystal microbalance (QCM).…”
Section: Resultsmentioning
confidence: 67%
“…However, under the given operating conditions [ 5 , 6 , 8 ], it is difficult to apply conventional H 2 -selective membranes, which require higher operation temperatures, approximately above 90, 180 and 350 °C for polymer [ 9 ], silica [ 10 , 11 , 12 ] and metal membranes [ 13 , 14 , 15 ], respectively. There are also technical issues such as water-induced swelling for polymer membranes, lower H 2 permeance for supported liquid membranes [ 16 , 17 , 18 ] and gas permeability degradation for intrinsically hydrophilic silica-based membranes [ 8 , 19 , 20 ].…”
Section: Introductionmentioning
confidence: 99%
“…Notable past work includes the original papers [9,10], the use of sol-gel techniques [11,12], chemical vapor deposition (CVD) [13,14] and plasma methods [15,16], the employment of diverse CVD precursors [17][18][19][20][21] and compositions [22][23][24], the determination of porosity [25], and the elucidation of the mechanism of permeation [26][27][28]. Important precedents are the use of dimethyldimethoxysilane (DMDMOS) [17] and other methyl-substituted siloxanes [29,30].…”
Section: Introductionmentioning
confidence: 99%