Fabrication and Evaluation of a MEMS Piezoelectric Bimorph Generator for Vibration Energy Harvesting

Lee, B. S.; Lin, Shih-Chieh; Wu, Wen-Jong

doi:10.1017/s172771910000469x

Cited by 16 publications

(5 citation statements)

References 26 publications

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“…The two layers are poled in opposite directions for serial poling. From their results, the conclusion was that serial poling provides more power however the optimal resistance is higher if the piezoelectric layers are connected in serial [42]. Figure 44 illustrated the poling direction for both parallel and serial polarization methods.…”

Section: Figure 35 -Active Tuning Device [33]mentioning

confidence: 99%

Automated tuning of a piezoelectric power harvesting cantilever beam via the application of an axial load

Tam¹

2021

Preprint

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This thesis deals with automatic tuning of piezoelectric power harvesters. A prototype was constructed to verify the effect of the application of an axial load on a cantilever beam and the effectiveness of increasing the power harvested from a piezoelectric beam via axial loading. It was shown, experimentally, that the natural frequency of a piezoelectric beam harvester can be changed over a range of 25Hz. From the experimental results it was shown that the power can increase up to seven times when tuned in comparison to unturned. Computer simulations were used to demonstrate a closed loop tuning system’s ability to apply an axial load effectively onto a piezoelectric cantilever beam in response to ambient vibrations. The closed loop tuning system is a viable option for tuning and can lead to increased power when applying the axial load suggested by the tuning system.

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Section: Figure 35 -Active Tuning Device [33]mentioning

confidence: 99%

Automated tuning of a piezoelectric power harvesting cantilever beam via the application of an axial load

Tam¹

2021

Preprint

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“…The magnitude of displacement of each oscillator is then obtained by the simplification of equations (9), (23) and (25). This givesF…”

Section: Parallel-sshi Circuitmentioning

confidence: 99%

“…Piezoelectric energy harvesting based on the resonant vibration of a single piezoelectric oscillator has received significant research attention recently [8, 9, 38-40, 42, 48, 49, 51]. It has many merits over other vibration-to-electricity transduction methods due to the high electromechanical coupling, no requirement for external voltage sources and ease of implementation in tiny devices [6,17,23,35,36,41,43,54,61,63]. As a result, improvements in the use of piezoelectric elements for power harvesting have witnessed a dramatic rise.…”

Section: Introductionmentioning

confidence: 99%

Analysis of an array of piezoelectric energy harvesters connected in series

Lin

Lien

et al. 2013

Smart Mater. Struct.

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This paper investigates the electrical response of a series connection of piezoelectric energy harvesters (PEHs) attached to various interface electronics, including standard and parallel-/series-SSHI (synchronized switch harvesting on inductor) circuits. In contrast to the case of parallel connection of multiple oscillators, the system response is determined by the matrix formulation of charging on a capacitance. In addition, the adoption of an equivalent impedance approach shows that the capacitance matrix can be explicitly expressed in terms of the relevant load impedance. A model problem is proposed for performance evaluation of harvested power under different choices of interface circuits. The result demonstrates that the parallel-SSHI array system exhibits higher power output with moderate bandwidth improvement, while the series-SSHI system delivers a pronounced wideband at the cost of peak harvested power. The standard array system shows a mild ability in power harvesting between these two SSHI systems. Finally, comparisons between the series and parallel connection of oscillators are made, showing the striking contrast of these two cases.

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“…Based on layering of materials in cantilevers, the cantilevers are classified into unimorph and bimorph in which bimorph can be further classified as series and parallel. Unimorph is a cantilever structure which is a combination of one active and one passive layer, whereas bimorph is a cantilever structure which combines two active layers or two active layers with a passive layer in between them [24,25]. The active layer can be made up of any piezoelectric material like Zinc Oxide (ZnO) or s Lead Zirconium Titanate (PZT).…”

Section: Introductionmentioning

confidence: 99%

Performance improvement of piezoelectric materials in energy harvesting in recent days – a review

Varadha¹,

Rajakumar²

2018

J. vibroeng.

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Piezoelectric elements are inevitable in modern day physics playing a vital role in many applications. Any piezoelectric element requires compression to produce energy in the form of a weak electrical ac signal. Mechanical vibrations are known to cause deflections which are enough to produce energy from the piezoelectric materials. In this paper, a review of the piezoelectric materials is made on their basic modes of excitation for producing energy. Also, various mechanisms and techniques used to harvest energy recently are presented and discussed extensively. Piezoelectric energy harvesting using MEMS is emphasized much as this is the era of micromechanical systems. Most of the piezoelectric energy harvesting systems relies on cantilever-oriented deflection to produce maximum vibration. In general cantilever beams fitted with piezoelectric materials produce electrical energy from mechanical vibration when deflected; hence detailed review on the different shapes of cantilever is also submitted. Significant parameters contributing to improved performance are dealt with special importance.

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Fabrication and Evaluation of a MEMS Piezoelectric Bimorph Generator for Vibration Energy Harvesting

Cited by 16 publications

References 26 publications

Automated tuning of a piezoelectric power harvesting cantilever beam via the application of an axial load

Automated tuning of a piezoelectric power harvesting cantilever beam via the application of an axial load

Analysis of an array of piezoelectric energy harvesters connected in series

Performance improvement of piezoelectric materials in energy harvesting in recent days – a review

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