Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors

Seo, Duckbong; Jung, Sunghoon; Lombardo, Stephen J.; Feng, Z. C.; Chen, J.K.; Zhang, Kun

doi:10.1016/j.sna.2010.11.013

Cited by 43 publications

(19 citation statements)

References 14 publications

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“…PDCs with thickness above 500 m typically exhibit cracks or warping [30,31]. To avoid this issue, a new PDC softlithography fabrication method is developed to realize PDC substrates up to 1500-m thick without the aforementioned problems.…”

Section: Fabrication Process Of Pdc Pressure Sensormentioning

confidence: 99%

Evanescent-mode-resonator-based and antenna-integrated wireless passive pressure sensors for harsh-environment applications

Cheng

Shao

Ebadi

et al. 2014

Sensors and Actuators A: Physical

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Section: Fabrication Process Of Pdc Pressure Sensormentioning

confidence: 99%

Evanescent-mode-resonator-based and antenna-integrated wireless passive pressure sensors for harsh-environment applications

Cheng

Shao

Ebadi

et al. 2014

Sensors and Actuators A: Physical

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“…5 Besides that, different material formats and complex shapes can be made with the liquid processing ability of the polymer precursors, for example, thin films, hollow tubes, additively manufactured 3D objects, and bulk ceramics. 6,7 Among the PDCs, silicon oxycarbide (SiOC) has attracted considerable interest because of its enhanced thermomechanical properties, [8][9][10] high thermal stability, 11 and superior thermal conductivity. 12 In order to expand the scope of applications for SiOC ceramics, both inert and active fillers can be incorporated into polymer precursors before cross-linking to adjust their thermomechanical properties and functional properties.…”

Section: Introductionmentioning

confidence: 99%

Nickel‐containing magnetoceramics from water vapor‐assisted pyrolysis of polysiloxane and nickel 2,4‐pentanedionate

Yang

Gao

et al. 2019

J Am Ceram Soc

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In this study, novel ferromagnetic Ni‐containing silicon oxycarbide (SiOC–Ni) was successfully fabricated from a base polysiloxane (PSO) with the addition of nickel 2,4‐pentanedionate. The resultant SiOC–Ni nanocomposite consists of in situ formed Ni nanocrystallites with a small amount of NiO uniformly dispersed in the amorphous SiOC matrix, and the corresponding nanocrystallite size increases with the increase of the pyrolysis temperature. The formation of nickel silicides (NixSiy) is completely suppressed by the effect of water vapor during the pyrolysis. The fundamental phase evolution process and mechanisms are explained. In an argon atmosphere, the SiOC–Ni materials pyrolyzed at 900°C are stable up to 1000°C with less than 6 wt% weight loss; they exhibit desirable electrical conductivity up to ~900°C with the highest electrical conductivity at ~247 S/m. This series of SiOC–Ni materials also demonstrates exciting ferromagnetic behaviors. Their new semiconducting behavior with soft ferromagnetism presents promising application potentials for magnetic sensors, transformers, actuators, etc.

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“…40 and 135 for polycrystalline silicon and single crystal silicon, respectively . Additionally, PDCs show excellent chemical and mechanical properties (eg, high thermal stability, good oxidation/corrosion resistance, and good creep resistance under extreme environments), making PDCs promising materials for the development of harsh environment sensors …”

Section: Introductionmentioning

confidence: 99%

Low‐frequency dielectric dispersion in polymer‐derived amorphous silicon carbonitride ceramics

Cao

Zhu

et al. 2018

J Am Ceram Soc

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The dielectric response of polymer‐derived amorphous silicon carbonitride (PDC‐SiCN) material was studied over a wide frequency range from 1 mHz to 10 MHz. Aside from presenting a relaxation process over 105 to 0.03 Hz frequency range, the material showed a strong low‐frequency dielectric dispersion (LFDD), which resulted in extremely high permittivities (up to 105) at frequencies lower than 0.03 Hz. It is identified that this LFDD resulted from relaxation process was not induced by conductivity. Therefore, PDC‐SiCN material showed two relaxation processes. Based on its microstructure, two polarization mechanisms were proposed for PDC‐SiCN: a mechanism based on polarons generated by unpaired electrons present in the material and an interfacial polarization mechanism as a result of different properties of SiCxN4−x matrix and free‐carbon clusters. Interfacial polarization process was simulated based on a parallel plate model involving two different materials. The result indicated that the relaxation time of an interfacial polarization can be distributed over a broad time range in the material.

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Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors

Cited by 43 publications

References 14 publications

Evanescent-mode-resonator-based and antenna-integrated wireless passive pressure sensors for harsh-environment applications

Evanescent-mode-resonator-based and antenna-integrated wireless passive pressure sensors for harsh-environment applications

Nickel‐containing magnetoceramics from water vapor‐assisted pyrolysis of polysiloxane and nickel 2,4‐pentanedionate

Low‐frequency dielectric dispersion in polymer‐derived amorphous silicon carbonitride ceramics

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