2018
DOI: 10.1002/smll.201703852
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Fabrication and Deformation of 3D Multilayered Kirigami Microstructures

Abstract: Mechanically guided 3D microassembly with controlled compressive buckling represents a promising emerging route to 3D mesostructures in a broad range of advanced materials, including single-crystalline silicon (Si), of direct relevance to microelectronic devices. During practical applications, the assembled 3D mesostructures and microdevices usually undergo external mechanical loading such as out-of-plane compression, which can induce damage in or failure of the structures/devices. Here, the mechanical respons… Show more

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Cited by 31 publications
(18 citation statements)
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References 32 publications
(31 reference statements)
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“…The strain then starts to increase under further stretching. The maximum principal strain at a applied biaxial strain of 0% (fully released) is lower than the typical fracture limit of bulk Si (≈2%) and also that of single crystalline nano Si (5–7%) . The results suggest that higher biaxial prestrain are possible, where the areal fill factor could also further increase as described in the following.…”
mentioning
confidence: 68%
“…The strain then starts to increase under further stretching. The maximum principal strain at a applied biaxial strain of 0% (fully released) is lower than the typical fracture limit of bulk Si (≈2%) and also that of single crystalline nano Si (5–7%) . The results suggest that higher biaxial prestrain are possible, where the areal fill factor could also further increase as described in the following.…”
mentioning
confidence: 68%
“…Although fabrication techniques based on 3D printing, templated growth, and controlled folding/rolling are useful in many contexts, each has limitations in materials compatibility, accessible feature size or, most critically, alignment with state‐of‐the‐art 2D processing techniques used in the semiconductor industry. A portfolio of recently presented methods allow geometric transformation of such 2D systems (referred to here as 2D precursors) into 3D structures by the action of compressive forces delivered at precisely defined locations via a prestretched silicone elastomer substrate . Such strategies are compatible with the most advanced planar technologies and functional materials, with feature sizes that can span from nanometer to meter scales .…”
Section: Introductionmentioning
confidence: 99%
“…1d and e). Aer dialysis, the nanostructures were subjected to elemental analysis, 51,52 which showed a similar chemical composition of N, C, and H as the SCMs (Table S1 †). Furthermore, 1 H NMR spectroscopy of a small amount of the precipitate showed similar peaks to the acrylate-PCL-N 3 (Fig.…”
Section: Resultsmentioning
confidence: 99%